Cluster model of the formation of aluminum nitride in alumina nanoreactors
Keyword(s):
The non-traditional method of obtainingclusters of heterogenous and homogenous nanooxides, nitrides of aluminum by substitution ofoxygen atoms with low-energy nitrogen ions inthe solid phase inside the nanopores of aluminum oxide Al2O3 (nanosapfire) is proposed and implemented. The AlN, AlNxO1-x, Al2O3 nanolayers was experimentally obtained
2016 ◽
Vol 18
(1)
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pp. 458-465
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2013 ◽
Vol 781-784
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pp. 357-361
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Keyword(s):
2018 ◽
Vol 344
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pp. 58-61
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2018 ◽
Vol 7
(5)
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pp. X3-X3
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