Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor

This study presents of the microsphere-based fiber-optic sensor with the ZnO ALD coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100°C to 300°C, with a 10°C step. The interferometric signal is used to control whether the microstructure is intact. Spectrum shift of a reflected signal is used to conclude changes in measured parameter for the sensor with a 100 nm coating, while the reflected signal intensity is an indicator during measurements executed by a sensor with a 200 nm coating. With changing temperature, the peak position or intensity of a reflected signal also changes. The R2 coefficient of the presented sensors indicates a linear fit of over 0.99 to the obtained data. The sensitivity of the sensors, investigated in this study, equals 103.5 nW/°C and 0.019 nm/°C for ZnO thickness of 200 nm and 100 nm, respectively.