Temperature Fiber-Optic Sensor with ZnO ALD Coating

This study presents a microsphere-based fiber-optic sensor with a ZnO Atomic Layer Deposition (ALD) coating thickness of 100 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100 °C to 300 °C, with a 10 °C step. An interferometric signal is used to control whether the microstructure is whole. Spectrum shift of a reflected signal is used to ascertain changes in the measured parameter. With changing temperature, the peak position of a reflected signal also changes. The R2 coefficient of the presented sensor indicates a good linear fit of over 0.99 to the obtained data. The sensitivity of the sensor investigated in this study equals 0.019 nm/°C.

Download Full-text

Optical-Fiber Microsphere-Based Temperature Sensors with ZnO ALD Coating—Comparative Study

Sensors ◽

10.3390/s21154982 ◽

2021 ◽

Vol 21 (15) ◽

pp. 4982

Author(s):

Paulina Listewnik ◽

Mikhael Bechelany ◽

Paweł Wierzba ◽

Małgorzata Szczerska

Keyword(s):

Fiber Optic ◽

Optical Power ◽

Atomic Layer ◽

Temperature Sensors ◽

Fiber Optic Sensor ◽

Optic Sensor ◽

Layer Deposition ◽

Spectrum Shift ◽

Linear Fit ◽

Reflected Signal

This study presents the microsphere-based fiber-optic sensor with the ZnO Atomic Layer Deposition coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range from 100 °C to 300 °C, with a 10 °C step. The interferometric signal was used to monitor the integrity of the microsphere and its attachment to the connecting fiber. For the sensor with a 100 nm coating, a spectrum shift of the reflected signal and the optical power of the reflected signal were used to measure temperature, while only the optical power of the reflected signal was used in the sensor with a 200 nm coating. The R2 coefficient of the discussed sensors indicates a linear fit of over 0.99 to the obtained data. The sensitivity of the sensors, investigated in this study, equals 103.5 nW/°C and 19 pm/°C or 11.4 nW/°C for ZnO thickness of 200 nm and 100 nm, respectively.

Download Full-text

Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor

10.20944/preprints202103.0013.v1 ◽

2021 ◽

Author(s):

Paulina Listewnik ◽

Mikhael Bechelany ◽

Małgorzata Szczerska

Keyword(s):

Coating Thickness ◽

Temperature Sensor ◽

Fiber Optic ◽

Peak Position ◽

Fiber Optic Sensor ◽

Measured Parameter ◽

Optic Sensor ◽

Spectrum Shift ◽

Linear Fit ◽

Reflected Signal

This study presents of the microsphere-based fiber-optic sensor with the ZnO ALD coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100°C to 300°C, with a 10°C step. The interferometric signal is used to control whether the microstructure is intact. Spectrum shift of a reflected signal is used to conclude changes in measured parameter for the sensor with a 100 nm coating, while the reflected signal intensity is an indicator during measurements executed by a sensor with a 200 nm coating. With changing temperature, the peak position or intensity of a reflected signal also changes. The R2 coefficient of the presented sensors indicates a linear fit of over 0.99 to the obtained data. The sensitivity of the sensors, investigated in this study, equals 103.5 nW/°C and 0.019 nm/°C for ZnO thickness of 200 nm and 100 nm, respectively.

Download Full-text

ZnO ALD-Coated Microsphere-Based Sensors for Temperature Measurements

Sensors ◽

10.3390/s20174689 ◽

2020 ◽

Vol 20 (17) ◽

pp. 4689

Author(s):

Paulina Listewnik ◽

Mikhael Bechelany ◽

Jacek B. Jasinski ◽

Małgorzata Szczerska

Keyword(s):

Experimental Data ◽

Zinc Oxide ◽

Fiber Optic ◽

Atomic Layer ◽

Temperature Measurements ◽

Fiber Optic Sensor ◽

Central Wavelength ◽

Sensor Head ◽

Optic Sensor ◽

Layer Deposition

In this paper, the application of a microsphere-based fiber-optic sensor with a 200 nm zinc oxide (ZnO) coating, deposited by the Atomic Layer Deposition (ALD) method, for temperature measurements between 100 and 300 °C, is presented. The main advantage of integrating a fiber-optic microsphere with a sensing device is the possibility of monitoring the integrity of the sensor head in real-time, which allows for higher accuracy during measurements. The study has demonstrated that ZnO ALD-coated microsphere-based sensors can be successfully used for temperature measurements. The sensitivity of the tested device was found to be 103.5 nW/°C when the sensor was coupled with a light source of 1300 nm central wavelength. The measured coefficient R2 of the sensor head was over 0.99, indicating a good fit of the theoretical linear model to the measured experimental data.

Download Full-text

Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor

Nanomaterials ◽

10.3390/nano9020306 ◽

2019 ◽

Vol 9 (2) ◽

pp. 306 ◽

Cited By ~ 7

Author(s):

Paulina Listewnik ◽

Marzena Hirsch ◽

Przemysław Struk ◽

Matthieu Weber ◽

Mikhael Bechelany ◽

...

Keyword(s):

Refractive Index ◽

Optical Fiber ◽

Fiber Optic ◽

Single Mode ◽

Atomic Layer ◽

Fiber Optic Sensor ◽

Refractive Index Sensor ◽

Layer Deposition ◽

Fabry Perot

We report the fabrication of a novel fiber-optic sensor device, based on the use of a microsphere conformally coated with a thin layer of zinc oxide (ZnO) by atomic layer deposition (ALD), and its use as a refractive index sensor. The microsphere was prepared on the tip of a single-mode optical fiber, on which a conformal ZnO thin film of 200 nm was deposited using an ALD process based on diethyl zinc (DEZ) and water at 100 °C. The modified fiber-optic microsphere was examined using scanning electron microscopy and Raman spectroscopy. Theoretical modeling has been carried out to assess the structure performance, and the performed experimental measurements carried out confirmed the enhanced sensing abilities when the microsphere was coated with a ZnO layer. The fabricated refractive index sensor was operating in a reflective mode of a Fabry–Pérot configuration, using a low coherent measurement system. The application of the ALD ZnO coating enabled for a better measurement of the refractive index of samples in the range of the refractive index allowed by the optical fiber. The proof-of-concept results presented in this work open prospects for the sensing community and will promote the use of fiber-optic sensing technologies.

Download Full-text