Triangular Prism and Slit Electrode Pair for ECF Jetting Fabricated by Thick Micromold and Electroforming as Micro Hydraulic Pressure Source for Soft Microrobots

2016 ◽  
Vol 10 (4) ◽  
pp. 470-478 ◽  
Author(s):  
Joon-Wan Kim ◽  
◽  
Thanh V. X. Nguyen ◽  
Kazuya Edamura ◽  
Shinichi Yokota ◽  
...  
Keyword(s):  
Fabrication Process ◽  
Dielectric Fluid ◽  
Electrode Pair ◽  
Hydraulic Pressure ◽  
Triangular Prism ◽  
Maximum Output ◽  
Output Pressure ◽  
Mems Fabrication ◽  
Micromechanical Systems ◽  
Air Compressors

In this paper, we propose a triangular prism and slit electrode pair (TPSE) and its micromechanical systems (MEMS) fabrication process for a novel micropump using electro-conjugate fluid (ECF), which is based on a thick photoresist (KMPR) micromold (≥ 500 μm) and nickel electroforming. ECF is a kind of functional and dielectric fluid. The strong and active jet flow of an ECF is generated between two electrodes surrounded by the ECF when a high direct-current voltage is applied to the electrode pair. The micropumps generated by the ECF jetting can be used as micro hydraulic pressure sources for soft microrobots. By substituting these ECF micropumps for bulky air compressors or hydraulic pumps utilized in soft robots, we can realize advanced soft microrobots in which the driving sources are embedded. An MEMS-based TPSE for an ECF micropump was successfully fabricated by using the proposed MEMS fabrication process. The maximum output pressure without a flow and the flow rate without a load were 24.6 kPa and 27.5 mm3/s, respectively, at an applied voltage of 2 kV. The experimental results show that the MEMS-fabricated TPSE is a good candidate for electrode-type ECF micropumps utilized in various applications of soft microrobots whose pressure sources are embedded inside.

Performance Evaluation of a Triangular-Prism-Slit Electrode Pair as an Electro-Conjugate Fluid Jet Generator

2011 ◽  
Author(s):  
Hai-bo Wang ◽  
Joon-wan Kim ◽  
Shinichi Yokota ◽  
Kazuya Edamura
Keyword(s):  
High Performance ◽  
Electrode Array ◽  
Research Field ◽  
Electrode Pair ◽  
Triangular Prism ◽  
Electrode Structure ◽  
Electrode Gap ◽  
Promising Candidate ◽  
Output Pressure ◽  
The Relationship

Electro-conjugate fluid (ECF) is a dielectric and functional fluid, which generates a powerful jet when electrodes inserted into it are subjected to a constant voltage of less than one thousand volts. As one essential research field on ECF, researchers have been conducting the study on electrodes. Several structures, e.g. planar parallel rod-like electrode array, ring-needle electrode pair and triangular-prism-slit (TPS) electrode pair, were proposed. Among them, the TPS electrode structure is often thought as the most promising candidate for future ECF applications thanks to its great merits of combining easy fabrication and relatively high performance. In this paper, in order to evaluate performance of the TPS electrode pair, a novel modular ECF-jet generator capable of independently adjusting alignment and gap of each electrode is designed. By utilizing it, the relationship between output pressure and parameters of the TPS electrode pair, including thickness, slit width, tip angle, electrode gap and alignment, are obtained.

Piezoelectric T-Beam Microactuators

2008 ◽  
Author(s):  
Hareesh K. R. Kommepalli ◽  
Andrew D. Hirsh ◽  
Christopher D. Rahn ◽  
Srinivas A. Tadigadapa
Keyword(s):  
Cross Section ◽  
Fabrication Process ◽  
Mems Fabrication ◽  
Out Of Plane ◽  
Cantilevered Beam ◽  
Piezoelectric Mems ◽  
The Cross ◽  
T Beam ◽  
Cross Section Geometry

This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

MEMS fabrication process management environment

2005 ◽  
Author(s):  
Jens Popp ◽  
Thilo Schmidt ◽  
Andreas Wagener ◽  
Kai Hahn
Keyword(s):  
Process Management ◽  
Fabrication Process ◽  
Mems Fabrication

A Design and Research on GMM Precision Flow Pump

2014 ◽  
Vol 602-605 ◽  
pp. 117-121
Author(s):  
De Hui Liu ◽  
Li Wen Liu ◽  
Gang Tang ◽  
Hong Min Wen ◽  
Quan Guo Lu
Keyword(s):  
Maximum Output ◽  
Output Pressure ◽  
Pump Flow ◽  
Magnetostrictive Materials ◽  
Giant Magnetostrictive Materials ◽  
New Type ◽  
Driving Source ◽  
Flow Pump

A new type of the precision flow pump is developed with the giant magnetostrictive materials as the driving source. Experiment has been conducted to test the performance of the pump with designed key components. The pump as the preloading mechanism, adopting an elastomer instead of a spring, not only simplifies the structure, but also improves the performance of the pump. A design is also made to some key components such as the giant magnetostrictive rod and driving coil. The result of experiment shows that the pump flow resolution records 1 ml/min~400ml/min and the maximum output pressure 0.6 MPa, which means the performance of this kind of pump is superior to ordinary diaphragm pumps.

Development of a novel thermal switch through CMOS MEMS fabrication process

2011 ◽  
Author(s):  
You-Liang Lai ◽  
Lei-Chun Chou ◽  
Ying-Zong Juang ◽  
Hann-Huei Tsai ◽  
Sheng-Chieh Huang ◽  
...  
Keyword(s):  
Fabrication Process ◽  
Thermal Switch ◽  
Mems Fabrication ◽  
Cmos Mems

A Fluid-Jet Amplifier With Flat Saturation Characteristics

1969 ◽  
Vol 91 (4) ◽  
pp. 734-739 ◽  
Author(s):  
W. S. Griffin
Keyword(s):  
Maximum Output ◽  
Noise Levels ◽  
Output Pressure ◽  
Control Signals ◽  
Maximum Value ◽  
Control Port ◽  
Differential Control ◽  
Percent Decrease

A proportional fluid-jet amplifier has been developed which exhibits flat saturation characteristics and also has reasonable gains, differential output pressures, and noise levels. The amplifier’s output pressure did not drop below 68 percent of its maximum value for any differential control-port pressure in excess of that which caused maximum receiver output. A three-stage, gain block showed less than 3.5 percent decrease in differential output pressure for control signals as high as 200 times their maximum output value.

scholarly journals A Generic MEMS Fabrication Process Based on a Thermal Budget Approach

2016 ◽  
Vol 06 (02) ◽  
pp. 97-107
Author(s):  
Carlos Ramón Báez Álvarez ◽  
Álvarez, Mónico Linares Aranda ◽  
Alfonso Torres Jácome ◽  
Mario Moreno Moreno ◽  
Joel Molina Reyes ◽  
...  
Keyword(s):  
Fabrication Process ◽  
Thermal Budget ◽  
Mems Fabrication
Sign in / Sign up

Export Citation Format

Share Document