Compact Force Sensor Using AT-Cut Quartz Crystal Resonator Supported by Novel Retention Mechanism

2009 ◽  
Vol 21 (2) ◽  
pp. 260-266 ◽  
Author(s):  
Keisuke Narumi ◽  
◽  
Ayumi Asakura ◽  
Toshio Fukuda ◽  
Fumihito Arai ◽  
...  
Keyword(s):  
External Force ◽  
High Speed ◽  
Quartz Crystal ◽  
Force Measurement ◽  
Force Sensor ◽  
Retention Mechanism ◽  
Sensor Output ◽  
Quartz Crystal Resonator ◽  
Crystal Resonator ◽  
Frequency Changes

The compact force sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external force, and features high sensitivity, high-speed response, a wide measurement range, and superior temperature and frequency stability. Quartz crystal resonators were rarely used in force measurement due to their poor stress concentration during bending. The objective of this study was to construct a sensor mechanism that safely maintains the quartz crystal resonator under external force. We designed and analyzed the novel retention mechanism of the quartz crystal resonator. The proposed structure is flat, small, and sensitive. Moreover, we designed and produced a compact case for mounting the retention mechanism. Sensor output is expected to be changed by thermal expansion, so we evaluated the temperature characteristics of the assembled sensor, finding the relationship of the temperature and sensor output to be linear and temperature easily compensated for.

Design and Characterization of Load Sensor with AT-Cut QCR for Miniaturization and Resolution Improvement

2010 ◽  
Vol 22 (3) ◽  
pp. 286-292 ◽  
Author(s):  
Keisuke Narumi ◽  
◽  
Toshio Fukuda ◽  
Fumihito Arai ◽  
Keyword(s):  
High Speed ◽  
Quartz Crystal ◽  
High Sensitivity ◽  
Measurement Range ◽  
Quartz Crystal Resonator ◽  
Load Measurement ◽  
Crystal Resonator ◽  
Load Sensor ◽  
Frequency Changes ◽  
Quartz Crystal Resonators

The compact load sensor we developed uses an AT-cut quartz crystal resonator whose resonance frequency changes under external load, featuring high sensitivity, high-speed response, and a wide measurement range – plus superior temperature and frequency stability. The vulnerability of previous quartz crystal resonators to stress concentration in bending prevented them from being more widely applied to load measurement. The sensor we developed maintains the quartz crystal resonator safely. Our objective here is to improve load measurement resolution and to miniaturize the sensor, which we did designing novel retention of the quartz crystal resonator fixed vertical to applied load. The new load sensor’s resolution is 3.21 mN –seven times better than conventional load sensors.

QUARTZ CRYSTAL RESONATOR BASED SCANNING PROBE MICROSCOPY

2005 ◽  
Vol 19 (26) ◽  
pp. 1303-1322 ◽  
Author(s):  
YONGHO SEO ◽  
SEUNGBUM HONG
Keyword(s):  
Scanning Probe Microscopy ◽  
Quartz Crystal ◽  
Electronic Device ◽  
Force Sensor ◽  
Scanning Probe ◽  
General Description ◽  
Quartz Crystal Resonator ◽  
Probe Microscopy ◽  
Crystal Resonator ◽  
Low Power Dissipation

The piezoelectric quartz crystal resonator is a common electronic device used for a reference clock which has high Q-valued resonance. In this paper, a general description on the quartz crystal resonator based scanning probe microscopy is presented. Most well-known type of the quartz crystal resonator is the tuning fork which has been employed as a force sensor in many different types of the scanning probe microscopy. The most important advantage of the quartz crystal resonator based scanning probe microscopy is high resolution imaging. Furthermore, it has potential to be used at low temperature due to its low power dissipation, compactness, and non-optical detection.

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