Controlling of Lattice Strains for Crack-Free and Strong Ferroelectric Barium Titanate Films by Post-Thermal Treatment
Abstract In this study, we experimentally demonstrate the fabrication of ultra-smooth and crystalline barium titanate (BTO) films on magnesium oxide (MgO) substrates by engineering the lattice strain and the crystal structure via thermal treatment. We first grow crack-free BTO thin films at oxygen-depleted condition, and enhance the ferroelectric characteristics by post-annealing at high temperature. The roughened surface due to recrystallization during post-annealing is controlled by chemical-mechanical polishing (CMP) to retain the ultra-smooth surface morphology. Oxygen-depleted deposition allows a highly strained BTO film to grow on a MgO substrate with an ultra-smooth surface, and post-annealing relaxes the strain, resulting in the enhancement of the ferroelectricity. From Raman spectroscopy, reciprocal space map (RSM), and capacitance–voltage (C–V) curve measurements, we observe that the ferroelectricity of the BTO film strongly depends on the lattice strain relaxation and the phase transition from a-axis to c-axis oriented crystal structure.