Low-Loss 4-6 GHz Tunable Filter with 3-Bit High-Q Orthogonal RF-MEMS Capacitance Network

ABSTRACTA technology platform is described for the integration of low-loss inductors, capacitors, and MEMS capacitors on a high-resistivity Si substrate. Using this platform the board space area taken up by e.g. a DCS PA output impedance matching circuit can be reduced by 50%. The losses of passive components that are induced by the semi-conducting Si substrate can effectively be suppressed using a combination of surface amorphisation and the use of poly crystalline Si substrates. A MEM switchable capacitor with a capacitance switching factor of 40 and an actuation voltage of 5V is demonstrated. A continuous tuneable dual-gap capacitor is demonstrated with a tuning ratio of 9 using actuation voltages below 15V.

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High-Q RF-MEMS tunable evanescent-mode cavity filter

2009 IEEE MTT-S International Microwave Symposium Digest ◽

10.1109/mwsym.2009.5165904 ◽

2009 ◽

Cited By ~ 17

Author(s):

Sang-June Park ◽

Isak Reines ◽

Gabriel Rebeiz

Keyword(s):

Rf Mems ◽

Evanescent Mode ◽

High Q

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Low-loss and Low-power-consumption wavelength tunable filter enabling colorless/directionless/contentionless optical drop in ROADMs

2014 The European Conference on Optical Communication (ECOC) ◽

10.1109/ecoc.2014.6963855 ◽

2014 ◽

Author(s):

Shoichi Takashina ◽

Yojiro Mori ◽

Hiroshi Hasegawa ◽

Ken-ichi Sato ◽

Toshio Watanabe

Keyword(s):

Power Consumption ◽

Low Power ◽

Tunable Filter ◽

Low Power Consumption ◽

Low Loss ◽

Wavelength Tunable

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DESIGN OPTIMIZATION OF LOW LOSS DISTRIBUTED RF MEMS PHASE SHIFTER

Mechanical and Electronics Engineering ◽

10.1142/9789814289795_0024 ◽

2009 ◽

Cited By ~ 1

Author(s):

SUKOMAL DEY ◽

KAMALJIT RANGRA ◽

SUJAY SHRIVASTAVA

Keyword(s):

Design Optimization ◽

Phase Shifter ◽

Rf Mems ◽

Low Loss

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A low-loss, continuously tunable microwave notch filter

International Journal of Microwave and Wireless Technologies ◽

10.1017/s1759078715000562 ◽

2015 ◽

Vol 8 (3) ◽

pp. 567-572 ◽

Cited By ~ 1

Author(s):

Öncel Acar ◽

Tom K. Johansen ◽

Vitaliy Zhurbenko

Keyword(s):

Software Defined Radio ◽

Notch Filter ◽

Tunable Filter ◽

Low Loss ◽

Tuning Method ◽

Unmet Demand ◽

Tuning Ratio ◽

Tunable Microwave

The development in high-end microwave transceiver systems toward the software defined radio has brought about the need for tunable frontend filters. Although the problem is being tackled by the microwave community, there still appears to be an unmet demand for practical tunable filter technologies. With this motivation, this work presents a tuning method that delivers a resonator Q0of 2000–3621 within a minimum tuning ratio of 1:1.42. A continuously tunable notch filter based on this tuning method is presented. The design is manufactured, measured, and verified. It is shown that the tuning technology compares favorably to other selected technologies.

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