Optical simulations of the ion beam emittance growth in different types of a gridded lens
2007 ◽
Vol 581
(3)
◽
pp. 581-585
1975 ◽
Vol 22
(3)
◽
pp. 1916-1918
◽
Focused Ion-Beam (FIB) Nanomachining of Silicon Carbide (SiC) Stencil Masks for Nanoscale Patterning
2012 ◽
Vol 717-720
◽
pp. 889-892
◽
Keyword(s):
Ion Beam
◽
2004 ◽
Vol 75
(5)
◽
pp. 1681-1683
◽