scholarly journals Low-temperature growth and orientational control in RuO{sub 2} thin films by metal-organic chemical vapor deposition

1996 ◽  
Author(s):  
G.R. Bai ◽  
A. Wang ◽  
C.M. Foster ◽  
J. Vetrone ◽  
J. Patel ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

2007 ◽  
Vol 515 (5) ◽  
pp. 2921-2925 ◽  
Author(s):  
Chunyu Wang ◽  
Volker Cimalla ◽  
Genady Cherkashinin ◽  
Henry Romanus ◽  
Majdeddin Ali ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Indium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Transparent Conducting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Low temperature metal-organic chemical vapor deposition of (Ba, Sr)TiO3 thin films for capacitor applications

2000 ◽  
Vol 30 (1-4) ◽  
pp. 37-44 ◽  
Author(s):  
Cheol Seong Hwang ◽  
Jaehoo Park ◽  
Doo Young Yang ◽  
Cheol Hoon Yang ◽  
Dong Hyun Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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