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Low-temperature growth of high-Tcsuperconducting films by plasma-enhanced metal-organic chemical vapor deposition
Phase Transitions
◽
10.1080/01411599308203502
◽
1993
◽
Vol 42
(1-2)
◽
pp. 111-115
Author(s):
Keiichi Kanehori
◽
Nobuyuki Sugii
◽
Shin'Ichiro Saito
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Temperature Growth
◽
Low Temperature Growth
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
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References
Low-temperature growth and orientational control in RuO2 thin films by metal-organic chemical vapor deposition
Thin Solid Films
◽
10.1016/s0040-6090(97)00353-2
◽
1997
◽
Vol 310
(1-2)
◽
pp. 75-80
◽
Cited By ~ 33
Author(s):
G.-R. Bai
◽
A. Wang
◽
C.M. Foster
◽
J. Vetrone
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Temperature Growth
◽
Low Temperature Growth
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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Low-temperature growth and orientational control in RuO{sub 2} thin films by metal-organic chemical vapor deposition
10.2172/505373
◽
1996
◽
Author(s):
G.R. Bai
◽
A. Wang
◽
C.M. Foster
◽
J. Vetrone
◽
J. Patel
◽
...
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Temperature Growth
◽
Low Temperature Growth
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
Low-temperature growth of ZnO epitaxial films by metal organic chemical vapor deposition
Applied Physics A
◽
10.1007/s00339-003-2156-y
◽
2004
◽
Vol 78
(1)
◽
pp. 25-28
◽
Cited By ~ 7
Author(s):
B.P. Zhang
◽
N.T. Binh
◽
K. Wakatsuki
◽
N. Usami
◽
Y. Segawa
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Epitaxial Films
◽
Organic Chemical
◽
Temperature Growth
◽
Low Temperature Growth
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
Download Full-text
An inductively coupled plasma metal organic chemical vapor deposition based on showerhead structure for low temperature growth
Materials Research Express
◽
10.1088/2053-1591/ac22c5
◽
2021
◽
Author(s):
Zixuan Zhang
◽
Yi Luo
◽
Jiadong Yu
◽
Xiang Li
◽
Jian Wang
◽
...
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Inductively Coupled Plasma
◽
Chemical Vapor
◽
Organic Chemical
◽
Temperature Growth
◽
Inductively Coupled
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition
Thin Solid Films
◽
10.1016/j.tsf.2006.08.030
◽
2007
◽
Vol 515
(5)
◽
pp. 2921-2925
◽
Cited By ~ 27
Author(s):
Chunyu Wang
◽
Volker Cimalla
◽
Genady Cherkashinin
◽
Henry Romanus
◽
Majdeddin Ali
◽
...
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Indium Oxide
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Transparent Conducting
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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Metal-organic chemical vapor deposition of quasi-normally-off AlGaN/GaN field-effect transistors on silicon substrates using low-temperature grown AlN cap layers
Applied Physics Letters
◽
10.1063/1.3475394
◽
2010
◽
Vol 97
(5)
◽
pp. 053502
◽
Cited By ~ 6
Author(s):
S. Tan
◽
S. L. Selvaraj
◽
T. Egawa
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Field Effect
◽
Field Effect Transistors
◽
Chemical Vapor
◽
Organic Chemical
◽
Silicon Substrates
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal–Organic Chemical Vapor Deposition
ACS Nano
◽
10.1021/acsnano.1c00811
◽
2021
◽
Author(s):
Minsoo Kang
◽
Hyun-Jun Chai
◽
Han Beom Jeong
◽
Cheolmin Park
◽
In-young Jung
◽
...
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
High Quality
◽
Layered Semiconductors
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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S/Mo ratio and petal size controlled MoS2 nanoflowers with low temperature metal organic chemical vapor deposition and their application in solar cells
Nanotechnology
◽
10.1088/1361-6528/abe32c
◽
2021
◽
Vol 32
(19)
◽
pp. 195206
Author(s):
Jaeseo Park
◽
Hyeji Park
◽
Suho Park
◽
Nguyen Thi Thuy
◽
Jihun Mun
◽
...
Keyword(s):
Solar Cells
◽
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
◽
Petal Size
◽
Size Controlled
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Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization
Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
◽
10.1116/1.590703
◽
1999
◽
Vol 17
(3)
◽
pp. 1101
◽
Cited By ~ 41
Author(s):
Jean E. Kelsey
◽
Cindy Goldberg
◽
Guillermo Nuesca
◽
Gregory Peterson
◽
Alain E. Kaloyeros
◽
...
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Diffusion Barrier
◽
Vapor Deposition
◽
Chemical Vapor
◽
Copper Metallization
◽
Organic Chemical
◽
Tungsten Nitride
◽
Metal Organic
◽
Organic Chemical Vapor Deposition
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Low temperature metal-organic chemical vapor deposition of advanced barrier layers for the microelectronics industry
Thin Solid Films
◽
10.1016/0040-6090(94)90479-0
◽
1994
◽
Vol 247
(1)
◽
pp. 85-93
◽
Cited By ~ 55
Author(s):
Ivo J. Raaijmakers
Keyword(s):
Chemical Vapor Deposition
◽
Low Temperature
◽
Vapor Deposition
◽
Chemical Vapor
◽
Organic Chemical
◽
Barrier Layers
◽
Metal Organic
◽
Microelectronics Industry
◽
Organic Chemical Vapor Deposition
Download Full-text
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