Low-temperature growth of ZnO epitaxial films by metal organic chemical vapor deposition

Applied Physics A ◽

10.1007/s00339-003-2156-y ◽

2004 ◽

Vol 78 (1) ◽

pp. 25-28 ◽

Author(s):

B.P. Zhang ◽

N.T. Binh ◽

K. Wakatsuki ◽

N. Usami ◽

Y. Segawa

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Epitaxial Films ◽

Organic Chemical ◽

Temperature Growth ◽

Low Temperature Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Low-temperature growth and orientational control in RuO2 thin films by metal-organic chemical vapor deposition

Thin Solid Films ◽

10.1016/s0040-6090(97)00353-2 ◽

1997 ◽

Vol 310 (1-2) ◽

pp. 75-80 ◽

Author(s):

G.-R. Bai ◽

A. Wang ◽

C.M. Foster ◽

J. Vetrone

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Temperature Growth ◽

Low Temperature Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Low-temperature growth and orientational control in RuO{sub 2} thin films by metal-organic chemical vapor deposition

10.2172/505373 ◽

1996 ◽

Author(s):

G.R. Bai ◽

A. Wang ◽

C.M. Foster ◽

J. Vetrone ◽

J. Patel ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Temperature Growth ◽

Low Temperature Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Low-temperature growth of high-Tcsuperconducting films by plasma-enhanced metal-organic chemical vapor deposition

Phase Transitions ◽

10.1080/01411599308203502 ◽

1993 ◽

Vol 42 (1-2) ◽

pp. 111-115

Author(s):

Keiichi Kanehori ◽

Nobuyuki Sugii ◽

Shin'Ichiro Saito

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Temperature Growth ◽

Low Temperature Growth ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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An inductively coupled plasma metal organic chemical vapor deposition based on showerhead structure for low temperature growth

Materials Research Express ◽

10.1088/2053-1591/ac22c5 ◽

2021 ◽

Author(s):

Zixuan Zhang ◽

Yi Luo ◽

Jiadong Yu ◽

Xiang Li ◽

Jian Wang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Inductively Coupled Plasma ◽

Chemical Vapor ◽

Organic Chemical ◽

Temperature Growth ◽

Inductively Coupled ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2006.08.030 ◽

2007 ◽

Vol 515 (5) ◽

pp. 2921-2925 ◽

Author(s):

Chunyu Wang ◽

Volker Cimalla ◽

Genady Cherkashinin ◽

Henry Romanus ◽

Majdeddin Ali ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Indium Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Transparent Conducting ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Metal-organic chemical vapor deposition of quasi-normally-off AlGaN/GaN field-effect transistors on silicon substrates using low-temperature grown AlN cap layers

Applied Physics Letters ◽

10.1063/1.3475394 ◽

2010 ◽

Vol 97 (5) ◽

pp. 053502 ◽

Author(s):

S. Tan ◽

S. L. Selvaraj ◽

T. Egawa

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Field Effect ◽

Field Effect Transistors ◽

Chemical Vapor ◽

Organic Chemical ◽

Silicon Substrates ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Low-Temperature and High-Quality Growth of Bi2O2Se Layered Semiconductors via Cracking Metal–Organic Chemical Vapor Deposition

ACS Nano ◽

10.1021/acsnano.1c00811 ◽

2021 ◽

Author(s):

Minsoo Kang ◽

Hyun-Jun Chai ◽

Han Beom Jeong ◽

Cheolmin Park ◽

In-young Jung ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

High Quality ◽

Layered Semiconductors ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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S/Mo ratio and petal size controlled MoS2 nanoflowers with low temperature metal organic chemical vapor deposition and their application in solar cells

Nanotechnology ◽

10.1088/1361-6528/abe32c ◽

2021 ◽

Vol 32 (19) ◽

pp. 195206

Author(s):

Jaeseo Park ◽

Hyeji Park ◽

Suho Park ◽

Nguyen Thi Thuy ◽

Jihun Mun ◽

...

Keyword(s):

Solar Cells ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Metal Organic ◽

Organic Chemical Vapor Deposition ◽

Size Controlled

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Low temperature metal-organic chemical vapor deposition of tungsten nitride as diffusion barrier for copper metallization

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590703 ◽

1999 ◽

Vol 17 (3) ◽

pp. 1101 ◽

Author(s):

Jean E. Kelsey ◽

Cindy Goldberg ◽

Guillermo Nuesca ◽

Gregory Peterson ◽

Alain E. Kaloyeros ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Diffusion Barrier ◽

Vapor Deposition ◽

Chemical Vapor ◽

Copper Metallization ◽

Organic Chemical ◽

Tungsten Nitride ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

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Low temperature metal-organic chemical vapor deposition of advanced barrier layers for the microelectronics industry

Thin Solid Films ◽

10.1016/0040-6090(94)90479-0 ◽

1994 ◽

Vol 247 (1) ◽

pp. 85-93 ◽

Author(s):

Ivo J. Raaijmakers

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Organic Chemical ◽

Barrier Layers ◽

Metal Organic ◽

Microelectronics Industry ◽

Organic Chemical Vapor Deposition

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