Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique
2019 ◽
Vol 11
(1)
◽
pp. 62-67
◽
Keyword(s):
Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam. Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.
2020 ◽
Vol 1659
◽
pp. 012018
2018 ◽
Vol 10
(3)
◽
pp. 1287
2018 ◽
Vol 10
(3)
◽
pp. 1278
◽
2008 ◽