Selective femtosecond laser structuring of a platinum/tantalum pentoxide thin film layer system by induced laser ablation investigated with pump-probe microscopy

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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Porous Silicon Films for Thin Film Layer Transfer and Wafer Bonding Applications

ECS Meeting Abstracts ◽

10.1149/ma2010-02/27/1727 ◽

2010 ◽

Keyword(s):

Thin Film ◽

Porous Silicon ◽

Wafer Bonding ◽

Silicon Films ◽

Layer Transfer ◽

Thin Film Layer ◽

Film Layer

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Advances in Thin Film Layer Sensors for Temperature Measurements in Highly Loaded Tribological Contacts under Mixed Lubrication

Friction, Wear and Wear Protection ◽

10.1002/9783527628513.ch59 ◽

2011 ◽

pp. 467-472

Author(s):

A. Albers ◽

S. Beauvais ◽

J. Bsul ◽

W. Burger

Keyword(s):

Thin Film ◽

Mixed Lubrication ◽

Temperature Measurements ◽

Thin Film Layer ◽

Film Layer ◽

Highly Loaded

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Electrical and Optical Properties of ZnO:Ag Thin-Films Depend on Lamination Formation by DC Magnetron Sputtering

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.1110.211 ◽

2015 ◽

Vol 1110 ◽

pp. 211-217

Author(s):

Jin Woo Lee ◽

Yun Hae Kim ◽

Chang Wook Park

Keyword(s):

Thin Film ◽

Thin Films ◽

Stacking Sequence ◽

Flat Panel Displays ◽

Oxide Systems ◽

Thin Film Layer ◽

Tin Oxides ◽

Impurity Doped ◽

Indium Oxides ◽

Film Layer

Transparent conductive oxides such as Impurity doped indium oxides, tin oxides, zinc oxide systems are widely used in the field of optoelectronics such as Photo voltaic solar cells, Flat panel displays. Recently in case of the ZnO / Ag Multilayer thin films, doping Ag films on the ZnO layer and ZnO deposited on top of it a way that has been used. However, if thin film applied to the semiconductor, because of lamination of various forms, characteristics of stacking sequence and thin film layer is a need for research. In this study, using DC magnetron sputteirng how the stacking sequence of the film and the transparent operation of various process variables, the possibility of the application to electronic devices was confirmed.

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