scholarly journals Mass Spectrometric Characterization of Pulsed Inductively Coupled Plasmas for Deposition of Thin Polyethylene Glycol-like Polymer Films.

2001 ◽  
Vol 14 (1) ◽  
pp. 91-100 ◽  
Author(s):  
Vasgen A. Shamamian ◽  
David D. Hinshelwood ◽  
Daniel C. Guerin ◽  
Ferencz S. Denes ◽  
Sorin Manolache
Keyword(s):  
Polyethylene Glycol ◽  
Polymer Films ◽  
Mass Spectrometric ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Thin Polyethylene

Optical Characterization of RF Inductively Coupled Plasmas

2006 ◽  
pp. 489-502 ◽  
Author(s):  
A. E. Wendt ◽  
D. F. Beale ◽  
W. N. G. Hitchon ◽  
E. Keiter ◽  
V. Kolobov ◽  
...  
Keyword(s):  
Optical Characterization ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Characterization of Low-k SiCOH Film Etching in Fluorocarbon Inductively Coupled Plasmas

2017 ◽  
Vol 9 (2) ◽  
pp. 174-178
Author(s):  
Haegyu Jang ◽  
Hoonbae Kim ◽  
Sungwoo Lee ◽  
Hyeonseok Moon ◽  
Donggeun Jung ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Low K
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