Resist Design Considerations for Direct Write and Projection Electron-Beam Lithography Technologies.
1996 ◽
Vol 9
(4)
◽
pp. 663-675
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Keyword(s):
2000 ◽
Vol 18
(2)
◽
pp. 681-684
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 41
(Part 1, No. 6B)
◽
pp. 4122-4126
2010 ◽
Vol 28
(6)
◽
pp. C6C1-C6C5
◽
Keyword(s):
2010 ◽
Vol 28
(5)
◽
pp. 940-945
◽
1989 ◽
Vol 7
(6)
◽
pp. 1426