Advanced direct write electron beam lithography for GaAs monolithic microwave integrated circuit production
1989 ◽
Vol 7
(6)
◽
pp. 1426
1992 ◽
Vol 10
(6)
◽
pp. 2936
◽
Resist Design Considerations for Direct Write and Projection Electron-Beam Lithography Technologies.
1996 ◽
Vol 9
(4)
◽
pp. 663-675
◽
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