Simple Method to Determine Linearity Deviations of Topography Measuring Instruments with a Large Range Axial Scanning System
Keyword(s):
System P
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The use of areal characterization of surface texture with high accuracy in aquality control process requires reliability. Therefore, regular inspection of themeasurement systems is needed. Important metrological features of a measure-ment system in dimensional metrology are the amplification factor and linearity.This paper presents a simple method for characterizing the axial scanningsystem of areal topography measuring instruments with little expense and effort,well suited for industrial routine calibration in the field. The method is based onemploying a single material measure with a range of step heights. It is shownthat the amplification factor and linearity deviations can be determined andadjusted for large axial measurement ranges.
2020 ◽
Vol 64
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pp. 243-248
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pp. 49-56
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pp. 125-139
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pp. 486-492
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Keyword(s):
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