Steps Toward Automated Deprocessing of Integrated Circuits

Author(s):  
E.L. Principe ◽  
Navid Asadizanjani ◽  
Domenic Forte ◽  
Mark Tehranipoor ◽  
Robert Chivas ◽  
...  

Abstract This paper discusses the development of an extensible programmatic workflow that leverages evolving technologies in 2D/3D imaging, distributed instrument control, image processing, and automated mechanical/chemical deprocessing technology. Initial studies involve automated backside mechanical ultra-thinning of 65nm node IC processor chips in combination with SEM imaging and X-ray tomography. Areas as large as 800μm x 800μm were deprocessed using gas-assisted plasma FIB delayering. Ongoing work involves enhancing the workflow with “intelligent automation” by bridging FIB-SEM instrument control and near real-time data analysis to establish a computationally guided microscopy suite.

Author(s):  
Halit Dogan ◽  
Md Mahbub Alam ◽  
Navid Asadizanjani ◽  
Sina Shahbazmohamadi ◽  
Domenic Forte ◽  
...  

Abstract X-ray tomography is a promising technique that can provide micron level, internal structure, and three dimensional (3D) information of an integrated circuit (IC) component without the need for serial sectioning or decapsulation. This is especially useful for counterfeit IC detection as demonstrated by recent work. Although the components remain physically intact during tomography, the effect of radiation on the electrical functionality is not yet fully investigated. In this paper we analyze the impact of X-ray tomography on the reliability of ICs with different fabrication technologies. We perform a 3D imaging using an advanced X-ray machine on Intel flash memories, Macronix flash memories, Xilinx Spartan 3 and Spartan 6 FPGAs. Electrical functionalities are then tested in a systematic procedure after each round of tomography to estimate the impact of X-ray on Flash erase time, read margin, and program operation, and the frequencies of ring oscillators in the FPGAs. A major finding is that erase times for flash memories of older technology are significantly degraded when exposed to tomography, eventually resulting in failure. However, the flash and Xilinx FPGAs of newer technologies seem less sensitive to tomography, as only minor degradations are observed. Further, we did not identify permanent failures for any chips in the time needed to perform tomography for counterfeit detection (approximately 2 hours).


1999 ◽  
Vol 5 (S2) ◽  
pp. 518-519
Author(s):  
Dale E. Newbury ◽  
David S. Bright

X-ray mapping is one of the most popular modes for displaying information obtained with x-ray spectrometry performed in the scanning electron microscope. This popularity arises from the ready accessibility and apparent simplicity of information presented in a pictorial fashion, especially when used in conjunction with other SEM imaging modes, such as backscattered, secondary, and specimen current electron images. Further, the rise of powerful, inexpensive computer systems capable of image processing and display has given the analyst a dedicated, on-line tool with the capacity and flexibility needed for problem solving. Figure 1 shows a typical example of mapping. Although the interpretation of x-ray images obtained with a modern digital control and recording system would seem to be straightforward and relatively trivial, there are significant pitfalls and limitations that can easily fool the unwary. In Figure 1, within an individual x-ray map, the observer can reasonably judge where the concentration is lower or higher, at least for a group of contiguous pixels. Can such judgments be made among a set of maps of the same region for different elements, or even for the same element from different regions of the same specimen? With current x-ray processing and display systems, the answers are generally no. In fact, problems that can influence interpretation can arise at each stage of x-ray generation/emission, x-ray spectral collection, processing, and display.


2014 ◽  
Vol 996 ◽  
pp. 187-191
Author(s):  
Robert Charles Wimpory ◽  
Mirko Boin

All aspects of instrument control, data acquisition, simulation and analysis are expected to merge in the future. For instance real time data analysis will feed back influencing the instrument control in order to optimize the measurement time and simulations themselves will control the instrument. This presentation will discuss how the all-important pre-planning of a measurement can be optimized and used to define the whole measurement, efficiently and effectively using the neutron beamtime.


2009 ◽  
Author(s):  
J. S. Adams ◽  
S. R. Bandler ◽  
L. E. Brown ◽  
K. R. Boyce ◽  
M. P. Chiao ◽  
...  

2013 ◽  
Vol 28 (S2) ◽  
pp. S220-S227 ◽  
Author(s):  
Stephanie Ryding ◽  
Robert Cernik ◽  
Jenny Wooldridge ◽  
Tim L Burnett ◽  
Mark Stewart ◽  
...  

A variable frequency ferroelectric polarisation measurement system has been designed and built at the UK's Diamond Light Source. The electric field induced phase transitions in Pb(Zr1−xTix)O3 (PZT) have been used to test the facility via in-situ measurements of electric polarisation and XRD. Stroboscopic and real time data collection methods on polycrystalline samples were employed as a function of frequency to determine the dynamic ferroelectric response. The system has been shown to deliver XRD patterns of good statistical quality measured over 40 points of a ferroelectric PE loop. The system is now available on station I11 as a user facility at the Diamond Light Source.


Author(s):  
Eega Krishna Chaithanya

Detecting the hand when it crosses the safety level and in return it also raises an alert in the form of alarm. So that the threat can be identified and proper measures are taken to overcome that. The methodology of the project goes as follows, taking input from camera , Image processing to detect hand, Projecting a line using computer vision, Raising alarm when hand crosses this projected safety line. The real time data is taken from the camera as an input to the Image processing algorithm. Then this input is processed to find the hand in image in it and checks whether the hand is crossing that safety line. If that hand is crossing the safety line we can simply raise alarm. The applications of the project are to the Employees who are working at industry are pushing the material into shredder machine. But somehow while pushing these material into shredder machine the employees are pushing their hands itself in the flow of work and the hands of employees were cut in that cause. So from a certain distance from shredder machine input we project a imaginary line using computer vision, So that if any hand crossing that imaginary line which is for safety we will raise an alarm. In addition, we can also extend the applications, by just replacing hand with the Bike, we can detect the bike, which is crossing the staggered stop line, and we can punish or fine them. As a part of object detection we are using Single short multibox detector.


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