Spectroscopic characterization of ZrO2 thin films grown by atomic layer deposition

2003 ◽  
Vol 52 (3) ◽  
pp. 289
Author(s):  
J Aarik ◽  
M Kirm ◽  
H Mändar
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Spectroscopic Characterization ◽  
Layer Deposition

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Luminescent properties of europium titanium phosphate thin films deposited by atomic layer deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (13) ◽  
pp. 8051-8059 ◽  
Author(s):  
Michael N. Getz ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg ◽  
Ola Nilsen
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Titanium Phosphate ◽  
The Novel ◽  
Layer Deposition ◽  
Novel Material

Optical and structural characterization of luminescent thin films of the novel material europium titanium phosphate, deposited by atomic layer deposition.

Atomic layer deposition and characterization of Ga-doped ZnO thin films

2007 ◽  
Vol 42 (1-6) ◽  
pp. 172-175 ◽  
Author(s):  
K. Saito ◽  
Y. Hiratsuka ◽  
A. Omata ◽  
H. Makino ◽  
S. Kishimoto ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Layer Deposition ◽  
Doped Zno

Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

2009 ◽  
Vol 517 (20) ◽  
pp. 5819-5824 ◽  
Author(s):  
Matti Putkonen ◽  
Timo Sajavaara ◽  
Paavo Rahkila ◽  
Leiting Xu ◽  
Sulin Cheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Synthesis and characterization of PbTe thin films by atomic layer deposition

2014 ◽  
Vol 211 (6) ◽  
pp. 1329-1333 ◽  
Author(s):  
K. Zhang ◽  
A. D. Ramalingom Pillai ◽  
M. Tangirala ◽  
D. Nminibapiel ◽  
K. Bollenbach ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Synthesis And Characterization ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document