Synthesis and characterization of PbTe thin films by atomic layer deposition

2014 ◽  
Vol 211 (6) ◽  
pp. 1329-1333 ◽  
Author(s):  
K. Zhang ◽  
A. D. Ramalingom Pillai ◽  
M. Tangirala ◽  
D. Nminibapiel ◽  
K. Bollenbach ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Synthesis And Characterization ◽  
Layer Deposition

Second-generation hexavalent molybdenum oxo-amidinate precursors for atomic layer deposition

2017 ◽  
Vol 46 (4) ◽  
pp. 1172-1178 ◽  
Author(s):  
T. Jurca ◽  
A. W. Peters ◽  
A. R. Mouat ◽  
O. K. Farha ◽  
J. T. Hupp ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Second Generation ◽  
Atomic Layer ◽  
Synthesis And Characterization ◽  
Layer Deposition

The synthesis and characterization of molybdenum oxo-amidinate ALD precursors MoO2(R2AMD)2[AMD =N,N′-di-R-acetamidinate; R = Cy (2; cyclohexyl) andiPr (3)] is reported.

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition
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