scholarly journals HRTEM Microstructural Characterization of β-WO3 Thin Films Deposited by Reactive RF Magnetron Sputtering

Materials ◽  
2017 ◽  
Vol 10 (2) ◽  
pp. 200 ◽  
Author(s):  
A. Faudoa-Arzate ◽  
A. Arteaga-Durán ◽  
R.J. Saenz-Hernández ◽  
M.E. Botello-Zubiate ◽  
P.R. Realyvazquez-Guevara ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Microstructural Characterization ◽  
Rf Magnetron Sputtering ◽  
Wo3 Thin Films ◽  
Reactive Rf Magnetron Sputtering

Microstructural characterization of YBaCuO thin films deposited by rf magnetron sputtering as a function of annealing conditions

1991 ◽  
Vol 6 (2) ◽  
pp. 252-263 ◽  
Author(s):  
M. Ece ◽  
R.W. Vook ◽  
John P. Allen
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Buffer Layer ◽  
Microstructural Characterization ◽  
Rf Magnetron Sputtering ◽  
Flash Evaporation ◽  
Annealing Conditions ◽  
Deposited Films

Thin films of Y1Ba2Cu3O7−x have been prepared on MgO, SrTiO3/Al2O3, and Al2O3 substrates by rf magnetron sputtering. A buffer layer of SrTiO3 was deposited on Al2O3 by flash evaporation. The as-deposited films on MgO and SrTiO

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