Flexible tactile sensor can be integrated into artificial skin and applied in industrial robot and biomedical engineering. However, the presented tactile sensors still have challenge in increasing sensitivity to expand the sensor’s application. Aiming at this problem, this paper presents an ultra-sensitive flexible tactile sensor. The sensor is based on piezoresistive effect of graphene film and is composed of upper substrate (PDMS bump with a size of 5 mm × 7 mm and a thickness of 1 mm), medial Graphene/PET film (Graphene/PET film with a size of 5 mm × 7 mm, PET with a hardness of 2H) and lower substrate (PI with fabricated electrodes). We presented the structure and reduced the principle of the sensor. We also fabricated several sample devices of the sensor and carried out experiment to test the performance. The results show that the sensor performed an ultra high sensitivity of 10.80/kPa at the range of 0–4 kPa and have a large measurement range up to 600 kPa. The sensor has 4 orders of magnitude between minimum resolution and maximum measurement range which have great advantage compared with state of the art. The sensor is expected to have great application prospect in robot and biomedical.
HIGH SENSITIVITY AND LARGE MEASUREMENT RANGE REFRACTOMETRY SENSING BASED ON MACH-ZEHNDER INTERFEROMETER
