Ignition of A Plasma Discharge Inside An Electrodeless Chamber: Methods and Characteristics
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In this paper the generation and diagnostics of a reduced pressure (300 mTorr to 3 Torr) plasma generated inside an electrodeless containment vessel/chamber are presented. The plasma is ignited by a guided ionization wave emitted by a low temperature pulsed plasma jet. The diagnostics techniques include Intensified Charge Coupled Device (ICCD) imaging, emission spectroscopy, and Langmuir probe. The reduced-pressure discharge parameters measured are the magnitude of the electric field, the plasma electron number density and temperature, and discharge expansion speed.
2013 ◽
Vol 88
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pp. 98-103
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2005 ◽
Vol 7
(6)
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pp. 3137-3138
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2017 ◽
Vol 19
(2)
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pp. 025403
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2018 ◽
Keyword(s):
2021 ◽
pp. 107744
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