scholarly journals Micromechanical Force Sensor Using the Stress–Impedance Effect of Soft Magnetic FeCuNbSiB

Sensors ◽  
2021 ◽  
Vol 21 (22) ◽  
pp. 7578
Author(s):  
Joerg Froemel ◽  
Gildas Diguet ◽  
Masanori Muroyama
Keyword(s):  
Thin Film ◽  
Tactile Sensor ◽  
Force Sensor ◽  
Gauge Factor ◽  
Fabrication Technology ◽  
Soft Magnetic ◽  
Piezoresistive Effect ◽  
Large Yield ◽  
Application Potential ◽  
Si Effect

By using the stress–impedance (SI) effect of a soft magnetic amorphous FeCuNbSiB alloy, a micromachined force sensor was fabricated and characterized. The alloy was used as a sputtered thin film of 500 nm thickness. To clarify the SI effect in the used material as a thin film, its magnetic and mechanical properties were first investigated. The stress dependence of the magnetic permeability was shown to be caused by the used transducer effect. The sputtered thin film also exhibited a large yield strength of 983 GPa. Even though the fabrication technology for the device is very simple, characterization revealed a gauge factor (GF) of 756, which is several times larger than that achieved with conventional transducer effects, such as the piezoresistive effect. The fabricated device shows great application potential as a tactile sensor.

scholarly journals Simple Device to Measure Pressure Using the Stress Impedance Effect of Amorphous Soft Magnetic Thin Film

Micromachines ◽  
2020 ◽  
Vol 11 (7) ◽  
pp. 649
Author(s):  
Joerg Froemel ◽  
Satoru Akita ◽  
Shuji Tanaka
Keyword(s):  
Relative Permeability ◽  
Pressure Sensor ◽  
Electrical Response ◽  
Applied Pressure ◽  
Electric Circuit ◽  
Gauge Factor ◽  
Impedance Change ◽  
Soft Magnetic ◽  
Lumped Element ◽  
Si Effect

A simple micro-machined pressure sensor, based on the stress-impedance (SI) effect, was fabricated herein using typical micro-fabrication technologies. To sense pressure, a 1-µm thin, soft magnetic metallic film of FeSiB was sputtered and used as a diaphragm. Its electrical response (impedance change) was measured under pressure in a frequency band from 5 to 500 MHz. A lumped-element equivalent electric circuit was used to separate the impedance of the soft magnetic metal from other parasitic elements. The impedance change clearly depended on the applied pressure. It was also shown that the impedance change could be explained by a change in relative permeability, according to the theory of the SI effect. The radial stress in the diaphragm and the relative permeability exhibited a linear relationship. At a measurement frequency of 200 MHz, the largest sensor response, with a gauge factor of 385.7, was found. It was in the same order as the conventional sensors. As the proposed device is very simple, it has the potential for application as a cheap pressure sensor.

Dual spiral sandwiched magnetic thin film inductor using Fe–Hf–N soft magnetic films as a magnetic core

2002 ◽  
Vol 239 (1-3) ◽  
pp. 579-581 ◽  
Author(s):  
K.H. Kim ◽  
D.W. Yoo ◽  
J.H. Jeong ◽  
J. Kim ◽  
S.H. Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetic Films ◽  
Magnetic Core ◽  
Magnetic Thin Film ◽  
Soft Magnetic ◽  
Soft Magnetic Films

Properties of FeAl Soft Magnetic Thin Film

1985 ◽  
Vol 1 (6) ◽  
pp. 723-724 ◽  
Author(s):  
M. Matsumoto ◽  
A. Morisako
Keyword(s):  
Thin Film ◽  
Magnetic Thin Film ◽  
Soft Magnetic

Design and Evaluation of Detection Part in Tactile Sensor with Integration of Strain Gauge and Piezoelectric Thin Film

2020 ◽  
Vol 2020.11 (0) ◽  
pp. 28A3-MN1-2
Author(s):  
Liqiang Gong ◽  
Harutoshi Takahashi ◽  
Takashi Abe ◽  
Kensuke Kanda ◽  
Masayuki Sohgawa
Keyword(s):  
Thin Film ◽  
Strain Gauge ◽  
Tactile Sensor ◽  
Piezoelectric Thin Film

scholarly journals Experimental Fabrication of High Efficiency Force Sensor by Cr-Si-C Composite Thin Film

2010 ◽  
Vol 53 (5) ◽  
pp. 364-367 ◽  
Author(s):  
Shinya KONDO ◽  
Hajime TAMAKI ◽  
Hiroshi TAKENAKA ◽  
Mamoru TAKEMURA ◽  
Soichi OGAWA
Keyword(s):  
Thin Film ◽  
High Efficiency ◽  
Force Sensor ◽  
Composite Thin Film

scholarly journals Fabrication technology for high light-extraction ultraviolet thin-film flip-chip (UV TFFC) LEDs grown on SiC

2019 ◽  
Vol 34 (3) ◽  
pp. 035007 ◽  
Author(s):  
Burhan K SaifAddin ◽  
Abdullah Almogbel ◽  
Christian J Zollner ◽  
Humberto Foronda ◽  
Ahmed Alyamani ◽  
...  
Keyword(s):  
Thin Film ◽  
Flip Chip ◽  
High Light ◽  
Light Extraction ◽  
Fabrication Technology

High Sensitivity and Wide Range Soft Magnetic Tactile Sensor Based on Electromagnetic Induction

2020 ◽  
pp. 1-1
Author(s):  
Shipeng Xie ◽  
Yuanfei Zhang ◽  
Minghe Jin ◽  
Chongyang Li ◽  
Qingyuan Meng
Keyword(s):  
Electromagnetic Induction ◽  
High Sensitivity ◽  
Tactile Sensor ◽  
Soft Magnetic ◽  
Wide Range
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