Characterization of Boron Carbonitride (BCN) Thin Films Deposited by Radiofrequency and Microwave Plasma Enhanced Chemical Vapor Deposition
2008 ◽
Vol 5
(6)
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pp. 736-741
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Keyword(s):
2004 ◽
Vol 180-181
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pp. 254-258
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2000 ◽
Vol 127
(2-3)
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pp. 259-264
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2016 ◽
Vol 15
(4)
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pp. 614-618
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2002 ◽
Vol 6
(3)
◽
pp. 122-127
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Keyword(s):
2006 ◽
Vol 15
(9)
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pp. 1484-1491
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