The Study of Acceleration Effect for Piezoresistive Micro Pressure Sensor
2013 ◽
Vol 455
◽
pp. 455-459
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Keyword(s):
This paper reports the acceleration effect of a type of piezoresistive pressure sensor for micro-pressure measurement with a cross beam-membrane (CBM) structure. By using the finite element method (FEM) to analyze the stress distribution of the CBM structure and compared with the traditional structures under acceleration signals. Our results show that the sensitivity and linearity of the CBM is better than other structures, but also the acceleration disturb analysis indicating that the CBM structure offers low acceleration interference for micro-pressure measurement in vibration environments.
2019 ◽
Vol 29
(1)
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pp. 37-43
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Keyword(s):
2014 ◽
Vol 490-491
◽
pp. 510-513
2006 ◽
Vol 532-533
◽
pp. 269-272
1996 ◽
Vol 110
(5)
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pp. 502-507
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2019 ◽
Vol 9
(2S3)
◽
pp. 82-85
2011 ◽
Vol 60
(9)
◽
pp. 811-816
1993 ◽
Vol 30
(4)
◽
pp. 382-386