CuOX Films for NO2 Detection: Microstructural Characterization
2013 ◽
Vol 481
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pp. 133-136
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Copper oxides films as promising materials for gas sensors applications were studied. Copper oxide films were deposited onto Si/SiO2substrates using a citrate sol-gel method with the subsequent temperature treatment at 150-5000C. These films were characterized by means of secondary electron microscopy (SEM) and X-ray-absorption near-edge structure (XANES) spectroscopy. The prepared films were utilized in NO2sensors. The dependences of the NO2response on the operating temperature and NO2concentration (10-200 ppm) were investigated. The maximum NO2response was achieved for the film annealed at 2500C.
1994 ◽
Vol 52
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pp. 68-69