Hydrogen Dilution Influence on the SIC Films Optical and Micro-Structural Properties as the Window Layer of P-i-n Solar Cell
Keyword(s):
Band Gap
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The SiC thin films as the window layer was prepared by PECVD technology in this article, investigated the influence of hydrogen dilution on the optical and micro-structural properties of SiC thin films, Analyzed optical band-gap,deposition rate and surface morphology under different hydrogen dilution ratio, found the optimal growth craft under the same conditions. The results showed that the optical band-gap of the window layer achieved the widest 2.2ev when hydrogen dilution rate was 6.25.
2010 ◽
Vol 160-162
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pp. 1228-1232
Keyword(s):