Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology
2011 ◽
Vol 291-294
◽
pp. 3135-3138
◽
Keyword(s):
This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.
2010 ◽
Vol 13
(2)
◽
pp. 57-65
2009 ◽
Vol 19
(8)
◽
pp. 085028
◽
2018 ◽
Vol 7
(3.27)
◽
pp. 186
2014 ◽
Vol 472
◽
pp. 750-755
◽
Keyword(s):