Study of MEMS Based Micropyrotechnic Igniter

2014 ◽  
Vol 472 ◽  
pp. 750-755 ◽  
Author(s):  
Yan Xue ◽  
Chang Jun Shi ◽  
Xiao Ming Ren ◽  
Lan Liu ◽  
Rui Zhen Xie
Keyword(s):  
Power Consumption ◽  
Mechanical System ◽  
Electrical Power ◽  
Micro Electro Mechanical System ◽  
Experimental Results ◽  
The Other ◽  
Ignition Voltage ◽  
Mems Technology ◽  
Reliability Performance ◽  
Lead Styphnate

Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of lead styphnate (LTNR) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, lead styphnate). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω, which is triggered by electrical power delivered to LTNR. The resistance of Ni-Cr bridges is used to sense the temperature on the LTNR which is in contact. The other one point is the optimization of silicon chamber process obtaining incorporate configuration of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested with ignition voltage less than 13V. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.

Investigation on Properties of MEMS Based Micropyrotechnic Igniter

2014 ◽  
Vol 1055 ◽  
pp. 78-83
Author(s):  
Yan Xue ◽  
Chuan Ping ◽  
Rui Zhang ◽  
Xiao Ming Ren ◽  
Lan Liu ◽  
...  
Keyword(s):  
Power Consumption ◽  
Mechanical System ◽  
Potassium Salt ◽  
Electrical Power ◽  
Micro Electro Mechanical System ◽  
Experimental Results ◽  
The Other ◽  
Mems Technology ◽  
Reliability Performance

Micro-electro-mechanical system (MEMS) have recently seen their field of application extended to military. This is mainly due to the fact that MEMS technologies present a great to reduce the mass, cost, power consumption, while improving the reliability, performance and smartness. Application of MEMS technology, the micropyrotechnic igniter are produced.The principle is based on the integration of the potassium salt of 7-hydroxy-4,6-dinitro-5,7-dihydrobenzofuroxanide (KDNBF) material within a micropyrotechnic igniter, which is produced by MEMS with 3 by 3 micro-igniter. Each igniter contains three parts (the igniter chip, silicon chamber, KDNBF). One import point is the optimization of the igniter process obtaining Ni-Cr bridges with about 13Ω and Al bridges with about 350Ω, which are triggered by electrical power delivered to KDNBF. The resistance of Ni-Cr and Al bridges is used to sense the temperature on the KDNBF which are in contact. The other one point is firing testing of micropyrotechnic igniter. The ignition performance of micropyrotechnic igniter array are tested that including Ni-Cr bridges of the 50% sensitivity on voltage, current ignition is 10.83V,0.26A; including Al bridges of the 50% sensitivity on current ignition is 0.176A; the ignition of voltage is unstable. The experimental results will deeply contribute to the micropyrotechnic system. This paper will discuss all these point.

Study on ignition performance of tantalum nitride film energy exchangers based on new bridge area

2021 ◽  
pp. 2140020
Author(s):  
Xiao-Ming Ren ◽  
Ke-Xin Yu ◽  
Wei Ren ◽  
Lan Liu ◽  
Rui-Zhen Xie ◽  
...  
Keyword(s):  
Experimental Results ◽  
Tantalum Nitride ◽  
Nitride Film ◽  
Ignition Energy ◽  
Ignition Voltage ◽  
Action Time ◽  
Mems Technology ◽  
New Type ◽  
Film Transducer

In order to reduce the ignition energy of the tantalum nitride film transducer, a new type of energy exchangers bridge area was designed in this paper, and it was fabricated by MEMS technology. The parameters of ignition voltage, ignition energy, as well as action time were tested. The experimental results showed that in terms of ignition voltage, ignition energy, and action time, the value of the energy exchangers element of the new bridge area was lower than the value of the energy exchangers element of the conventional bridge area. In addition, ignition performance can be reduced by many energy exchangers in the new bridge area.

scholarly journals DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY

2010 ◽  
Vol 13 (2) ◽  
pp. 57-65
Author(s):  
Tan Duc Tran
Keyword(s):  
Mechanical System ◽  
Degrees Of Freedom ◽  
Micro Electro Mechanical System ◽  
Ansys Software ◽  
Mems Sensors ◽  
Mems Technology ◽  
Mems Device ◽  
Three Degrees Of Freedom

Nowadays, the Micro Electro Mechanical System (MEMS) technology’ has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it's widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.

Giant magnetoimpedance based immunoassay for cardiac biomarker myoglobin

2017 ◽  
Vol 9 (24) ◽  
pp. 3636-3642 ◽  
Author(s):  
Zhen Yang ◽  
Huanhuan Wang ◽  
Xinwei Dong ◽  
Hailong Yan ◽  
Chong Lei ◽  
...  
Keyword(s):  
Mechanical System ◽  
Micro Electro Mechanical System ◽  
Giant Magnetoimpedance ◽  
Cardiac Biomarker ◽  
Mems Technology

A GMI sensor integrated with a microcavity was fabricated by micro-electro-mechanical-system (MEMS) technology.

Application Research of MEMS ADXL345

2012 ◽  
Vol 457-458 ◽  
pp. 1550-1553 ◽  
Author(s):  
Cun Shan Xu
Keyword(s):  
Power Consumption ◽  
Mechanical System ◽  
Lower Cost ◽  
Electronic Devices ◽  
Micro Electro Mechanical System ◽  
Dynamical Characteristic ◽  
Application Research ◽  
Proper Method

Due to excellent characteristics of lower cost, higher reliability, smaller power consumption, less volume and lighter weight, micro electro mechanical system (MEMS) has been widely accepted and used in portable electronic devices. Based on port S3C2440, a proper method is presented to carry out the study of dynamical characteristic for tri-axial digital accelerometer ADXL345. The results could provide a well approach for improvement of this novel component.

Simulation of a Micro-Electro-Mechanical System for Generating Electrical Power From Pressurized Gas

2019 ◽  
Author(s):  
Andrew Cunningham ◽  
Brian D. Jensen
Keyword(s):  
Mechanical System ◽  
Electrical Power ◽  
Average Power ◽  
Micro Electro Mechanical System ◽  
Design Parameters ◽  
Energy Scavenging ◽  
Optimized Design ◽  
Novel Approach ◽  
Input Pressure ◽  
Air Valve

Abstract This paper presents a novel approach to energy scavenging for a micro-electro-mechanical system (MEMS) device to convert the energy stored in pressurized gas into electrical power. The proposed design uses input pressure to move a piston and magnet through a set of coils while pulling on another mass through non-linear springs to open and close the input air valve. The model demonstrates that the design is capable of staying in motion with continual input pressure (up to at least a time stamp of 1 second), and that an average power output of 9.47 μW over 5 ms can be achieved. We suggest that further research be done to optimize the design parameters and that the optimized design be used to the test the system.

scholarly journals Analysis of Charge Pump Topologies for High Voltage Mobile Microphone Applications

2021 ◽  
Vol 27 (2) ◽  
pp. 31-39
Author(s):  
Jakob K. Toft ◽  
Ivan H. H. Jorgensen
Keyword(s):  
Power Consumption ◽  
Mechanical System ◽  
High Voltage ◽  
Supply Voltage ◽  
Charge Pump ◽  
Micro Electro Mechanical System ◽  
Silicon On Insulator ◽  
High Bias ◽  
Low Supply Voltage ◽  
Very High

This paper presents a novel analysis of charge pump topologies for very high voltage capacitive drive micro electro-mechanical system microphones. For the application, the size and power consumption are sought to be minimized, and a voltage gain of 36 is achieved from a 5 V supply. The analysis compares known charge pump topologies, taking into consideration on resistance of transistors and parasitic capacitances of transistors and capacitors in a 180 nm silicon-on-insulator process. The analysis finds that the Pelliconi charge pump topology is optimal for generating very high bias voltages for micro electro-mechanical system microphones from a low supply voltage when the power consumption and area are limited by the application.

Design, Fabrication and Analysis of Microrobotic Insect Wings and Thorax with Different Materials by MEMS Technology

2011 ◽  
Vol 291-294 ◽  
pp. 3135-3138 ◽  
Author(s):  
Peng Cheng Chi ◽  
Wei Ping Zhang ◽  
Wen Yuan Chen ◽  
Hong Yi Li ◽  
Kun Meng
Keyword(s):  
Titanium Alloy ◽  
Mechanical System ◽  
Research Priorities ◽  
Micro Electro Mechanical System ◽  
Flapping Wing ◽  
Future Research ◽  
Parylene C ◽  
Insect Wings ◽  
Mems Technology ◽  
Materials Used

This paper presents a feasibility step in the development of biomimetic microrobotic insects. Advanced engineering technologies available for applications such as the micro-electro-mechanical system (MEMS) technologies are used. A flapping-wing flying MEMS concept and design inspired from insects is first described. Then different kinds of materials used feasibly for flapping-wing microrobotic insect by MEMS technology, such as SU-8, Titanium alloy and Parylene-C, are discussed. And artificial insect wings and thoraxs with different materials by MEMS Technology are fabricated and analyzed. Finally, summarize the paper and propose future research priorities.

Fabrication of Sub-Micron Silicon Vias by Deep Reactive Ion Etching

2005 ◽  
Author(s):  
Shawn X. D. Zhang ◽  
Ronald Hon ◽  
S. W. Ricky Lee
Keyword(s):  
Aspect Ratio ◽  
Mechanical System ◽  
Reactive Ion Etching ◽  
Micro Electro Mechanical System ◽  
Experimental Results ◽  
Mems Devices ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
3D Packaging ◽  
Silicon Vias

Deep reactive ion etching (DRIE) is a major microfabrication process for micro-electro-mechanical system (MEMS) devices. In recent years DRIE is also applied to make through-silicon-vias (TSVs) for 3D packaging. Typical DRIE-formed TSVs are in the range of a few microns to tens of microns. In the present study, silicon vias with diameters in the sub-micron range (0.5 μm and 0.8 μm) are attempted. For comparison purposes, larger silicon vias (1 μm and 3 μm) are fabricated as well. In this paper, the microfabrication processes are described. The experimental results and comparisons in terms of via uniformity, aspect ratio dependent etching, undercutting, and effects of various mask materials are discussed in detail.

Design, Fabrication and Study of Micro-Electrospray Chips

2006 ◽  
Vol 505-507 ◽  
pp. 1249-1254 ◽  
Author(s):  
Tzong Shyng Leu ◽  
Chi Hsiung Teng
Keyword(s):  
Biological Sample ◽  
Wedge Angle ◽  
Micro Electro Mechanical System ◽  
The Other ◽  
Constant Current ◽  
Sample Analysis ◽  
Mems Technology ◽  
Stable Cone ◽  
Visualization Techniques ◽  
High Viscous Fluid

This paper described design, fabrication and study of micro electrospray chips. The micro electrospray chips are fabricated by using micro-electro-mechanical system (MEMS) technology. The micro electrospray techniques can be used in many applications, including high viscous fluid dispenses for 3D rapid prototyping and biological sample analysis in mass spectrometer. In this study, micro electrospray chips with different wedge angels are investigated by using microscopic visualization techniques. Four spray modes are identified at various operation voltages and currents. It is found that the voltage for stable cone-jet mode decrease as wedge angle becomes smaller. On the other hand, it is also found that stable cone-jet mode represent a constant current range in current (I)-voltage(Ф) curve. It allows us to easily identify if the micro electrospray chips operate at cone-jet mode.

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