Uncertainty Evaluation of SEM-Based Nanoroughness Measurement

In metrology, a measurement process without uncertainty evaluation is incomplete. The same applies to nanoroughness metrology. In this paper, Scanning Electron Microscopy (SEM） measurement uncertainty of nanoroughness is studied based on ISO Geometric Product Specification and Verification (GPS). The uncertainty propagation model of SEM-based nanoroughness measurement is presented. The evaluation model of SEM-based standard measurement uncertainty is conducted. As a case study, the line edge roughness uncertainty produced by the JSM-6700F SEM is evaluated.

Download Full-text

Prognosis under Uncertainty – An Idealised Computational Case Study

Shock and Vibration ◽

10.1155/2008/958343 ◽

2008 ◽

Vol 15 (3-4) ◽

pp. 231-243 ◽

Cited By ~ 5

Author(s):

Keith Worden ◽

Graeme Manson

Keyword(s):

Parameter Uncertainty ◽

Isotropic Material ◽

Uncertainty Propagation ◽

Propagation Model ◽

Damage Propagation ◽

Finite Plate ◽

Damage Prognosis ◽

Propagation Law ◽

Central Mode

The object of this paper is to investigate computationally the possibility of damage prognosis in a structure under the most idealised circumstances. A simple isotropic material – Titanium alloy Ti-6Al-4V – is assumed. The structure is a simple finite plate under harmonic uniaxial loading and the damage is assumed to be a central mode 1 through crack for which various approximations to the stress intensity factor are known. The damage propagation model is the Paris-Erdogan law. Where the paper departs from complete simplicity is in the assumption that the parameters of the damage propagation law are uncertain. The paper investigates the effect of the parameter uncertainty on the estimated lifetime of the specimen. Two approaches are adopted for the uncertainty propagation, a statistical Monte Carlo scheme and one based on interval arithmetic.

Download Full-text

Evaluation and Optimization of Task-oriented Measurement Uncertainty for Coordinate Measuring Machines Based on Geometrical Product Specifications

Applied Sciences ◽

10.3390/app9010006 ◽

2018 ◽

Vol 9 (1) ◽

pp. 6 ◽

Cited By ~ 5

Author(s):

Yinbao Cheng ◽

Zhongyu Wang ◽

Xiaohuai Chen ◽

Yaru Li ◽

Hongyang Li ◽

...

Keyword(s):

Measurement Uncertainty ◽

Evaluation Model ◽

Optimization Method ◽

Practical Significance ◽

Measuring Instruments ◽

Coordinate Measuring Machines ◽

Measurement Instruments ◽

Practical Applications ◽

Geometric Product ◽

Task Oriented

Measuring instruments are intended to be intelligent, precise, multi-functional and developing multidirectionally, scientific, and reasonable; the reliable evaluation of measurement uncertainty of precision instruments is also becoming more and more difficult, and the evaluation of the Coordinate Measuring Machines (CMM) measurement uncertainty is among the typical problems. Based on Geometric Product Specification (GPS), this paper has systematically studied the CMM uncertainty for evaluating the size and geometrical errors oriented toward measurement tasks, and thus has realized the rapid and reliable evaluation of the CMM uncertainty for task-oriented measurement. For overestimation of the CMM uncertainty for task-oriented measurements in the initial evaluation, a systematic optimization solution has been proposed. Finally, the feasibility and validity of the evaluation model and the optimization method have been verified by three different types of measurement examples of diameter, flatness and perpendicularity. It is typical and representative to systematically solve the problem of the CMM uncertainty for evaluating the measurement tasks targeted at dimensions and geometric errors, and the research contents can be effectively applied to solve the uncertainty evaluation problems of other precision instruments, which are of great practical significance not only for promoting the combination of modern uncertainty theory and practical applications but also for improving the application values of precision measurement instruments.

Download Full-text

A Calculation Method for Compliance Uncertainty of GPS Standard-Chain

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.201-203.1642 ◽

2011 ◽

Vol 201-203 ◽

pp. 1642-1648

Author(s):

Jin Xing Wang ◽

Xiang Qian Jiang ◽

Pan Wang

Keyword(s):

Measurement Uncertainty ◽

Calculation Method ◽

Optimum Allocation ◽

Default State ◽

Geometrical Product Specification ◽

Complex Question ◽

Product Specification

The improved GPS (Geometrical Product Specification) system uses uncertainty as an economic tool to enable optimum allocation of resource amongst specification, manufacturing and verification. For a given GPS standard-chain, the key question is to calculate the compliance uncertainty. The determination of compliance uncertainty is a complex question because specification uncertainty and measurement uncertainty arise from many causes and propagate through the GPS standard-chain. A calculation method for compliance uncertainty of GPS standard-chain is proposed in this article. According to ISO 17450–2, a GPS process should be either in default state or special state. The biggest difference between the two states is that whether the specification operator is accordant with the verification operator. Aiming at the two states, the flow for the computation of compliance uncertainty is given respectively, and a case study is applied in default state. Results show it enables to generate compliance uncertainty on the verification of a GPS standard-chain, which makes the acceptance or refusal of GPS characteristic can be conducted in a quantitative way, so the veracity of verification could be improved.

Download Full-text

Study on Random-Fuzzy Variables Method for ADC Measurement Uncertainty Evaluation

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.568-570.76 ◽

2014 ◽

Vol 568-570 ◽

pp. 76-81

Author(s):

Wei Jiang ◽

Qi Zhang

Keyword(s):

Measurement Uncertainty ◽

Random Effects ◽

Uncertainty Propagation ◽

Uncertainty Evaluation ◽

Fuzzy Variables ◽

Measurement Result ◽

Random Fuzzy Variables ◽

Theory Of Evidence ◽

Power Measurements ◽

Measurement Uncertainty Evaluation

The random-fuzzy variables (RFVs) method based on the theory of evidence is studied, for the need of ADC uncertainty evaluation and the limitations of existing approaches. The connotation of RFVs adopted for expression of measurement result together with its associated uncertainty is discussed, and the RFVs mathematics for uncertainty propagation is analyzed. RFVs can naturally separate the contributions to the measurement uncertainty of the systematic and random effects. Taking power measurements as an example, RFVs method is applied to the presentation and propagation of the measurement uncertainty of ADC, and the results are compared with those obtained by GUM, which shows the RFVs method can be effectively employed in evaluating uncertainty of ADC, and is capable of providing the interval of confidence for all possible levels of confidence, within which the measurement result is supposed to lie.

Download Full-text

Measurement uncertainty evaluation model in radial composite gear inspection

Precision Engineering ◽

10.1016/j.precisioneng.2019.07.015 ◽

2019 ◽

Vol 60 ◽

pp. 222-234 ◽

Cited By ~ 5

Author(s):

M. Pueo ◽

R. Acero ◽

M.A. Lope ◽

J. Santolaria

Keyword(s):

Measurement Uncertainty ◽

Evaluation Model ◽

Uncertainty Evaluation ◽

Measurement Uncertainty Evaluation

Download Full-text

Measurement uncertainty evaluation model of field type circle time-grating sensor

AIP Advances ◽

10.1063/5.0011061 ◽

2020 ◽

Vol 10 (7) ◽

pp. 075020

Author(s):

Hongtao Yang ◽

Li Li ◽

Liusha Zhang ◽

Jiao Zhou ◽

Donglin Peng

Keyword(s):

Measurement Uncertainty ◽

Evaluation Model ◽

Uncertainty Evaluation ◽

Circle Time ◽

Field Type ◽

Measurement Uncertainty Evaluation

Download Full-text

Calibration Method and Measurement Uncertainty Evaluation for the Zero Error of Level Rules

IOP Conference Series Earth and Environmental Science ◽

10.1088/1755-1315/781/2/022053 ◽

2021 ◽

Vol 781 (2) ◽

pp. 022053

Author(s):

Yi Yang ◽

Tao Wang ◽

Liwei Dai

Keyword(s):

Measurement Uncertainty ◽

Calibration Method ◽

Uncertainty Evaluation ◽

Measurement Uncertainty Evaluation

Download Full-text

Grey Clustering Evaluation for the Cooperation Efficiency of PPP Project: Taking Beijing Metro Line 4 as an Example

Mathematical Problems in Engineering ◽

10.1155/2019/8232731 ◽

2019 ◽

Vol 2019 ◽

pp. 1-13 ◽

Cited By ~ 2

Author(s):

Hui Sun ◽

Yingzi Liang ◽

Yuning Wang

Keyword(s):

Public Sector ◽

Private Sector ◽

Evaluation Model ◽

Evaluation Index System ◽

The Public ◽

Clustering Model ◽

Grey Clustering ◽

Public Products ◽

Infrastructure Project

PPP model is an important model which provides public products or services based on the coordination between the public sector and private sector. The implementation of PPP model is helpful for relieving the stress of insufficient funding for public sector and improving the efficiency of resource allocation. Comparing with traditional infrastructure project, PPP project involves many stakeholders, and the cooperation efficiency during the different stakeholders impacts the results of the project directly. Thus, it is important to explore the cooperation efficiency of PPP project. Based on grey clustering model, this paper evaluates the cooperation efficiency of PPP project. An evaluation index system including 36 indexes is established based on the aims and objectives of three stakeholders (public sector, private sector, and passengers). A case study of Beijing Metro Line 4 PPP project is implemented to verify the validity and applicability of the evaluation model. And the results showed that the cooperation efficiency of Beijing Metro Line 4 PPP project is relatively high. The model also provided insights into the shortage of the cooperation efficiency of Beijing Metro Line 4 PPP project. As such, the results can assist all stakeholders in adjusting the cooperation efficiency.

Download Full-text