The Design of a New Biaxial Decoupled Resonant Micro-Accelerometer
A new biaxial decoupled resonant micro-accelerometer is researched. The new biaxial resonant micro-accelerometer consists of four same tuning forking resonators, four pair of decoupled beams, four lever mechanisms and a proof mass. The decoupling between two orthogonal axes is realized by the decoupling beams, which will benefit to isolate two axes acceleration detection. The simulation is implemented to verify the basic principle by the Ansys. The simulation results prove that the effective frequencies of two acceleration sensitive modes are 3.699 kHz and 3.718 kHz separately. Two pair of resonator modes which are 23.893 kHz, 23.946 kHz, 26.974 kHz and 26.999 kHz separately have about 3kHz difference in frequency in order to prevent the mutual interference. And the interference modes are isolated with effective mode apparently. The input-output characteristic simulation results indicate the y-axis scale factor is 57.1Hz/g and the coupling output in the x-axis is 0.0148Hz/g, while the x-axis scale factor is 56.1Hz/g and the coupling output in the y-axis is 0.0073Hz/g, which proves that the new biaxial resonant micro-accelerometer is practicable and has an excellent decoupled performance.