Preparation of WO3 Nanorods by Glancing Angle DC Reactive Magnetron Sputtering Deposition for NO2 Gas Sensing Application

2013 ◽  
Vol 770 ◽  
pp. 267-270
Author(s):  
T. Srichaiyaperk ◽  
K. Aimpanakit ◽  
M. Horprathum ◽  
S. Limwichean ◽  
C. Chananonnawathorn ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Gas Sensing ◽  
Operating Temperature ◽  
Fast Response ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Sputtering Deposition ◽  
Glancing Angle ◽  
Dc Reactive Magnetron Sputtering ◽  
Glad Technique

In this study, we present a tungsten trioxide (WO3) nanorods based gas sensor for NO2sensing at operating temperature range 150-350 °C in purify dry air carrier. WO3nanorods were fabricated by dc reactive magnetron sputtering with glancing angle deposition (GLAD) technique on silicon (100) wafer and alumina substrates interdigitated with gold electrode. The length of WO3nanorods was varied from 370 nm to 620 nm. As-deposited nanorods were annealed at a temperature of 400 °C in air for 1 h. The microstructure and phase structure of WO3nanorod were characterized by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FE-SEM), respectively. XRD of annealed WO3nanorod showed polycrystalline phase. The WO3nanorods length 420 nm exhibit excellent NO2sensing properties with a maximum sensitivity of 360 at 250 °C operating temperature with fast response and recovery time.

Investigation of Electrochromic WO3 Nanorods Prepared by DС Reactive Magnetron Sputtering with GLAD Technique

2013 ◽  
Vol 770 ◽  
pp. 136-139
Author(s):  
C. Chananonnawathorn ◽  
M. Horprathum ◽  
P. Eiamchai ◽  
T. Srichaiyaperk ◽  
K. Aiempanakit ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Deposition Time ◽  
High Surface ◽  
High Surface Area ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
X Ray Diffraction ◽  
Electrochromic Properties ◽  
Glancing Angle ◽  
Glad Technique

Tungsten oxide (WO3) nanorods were prepared by a DC reactive magnetron sputtering with a glancing-angle deposition (GLAD) technique, which promoted high surface area, for electrochromic applications. During the deposition, a high-quality tungsten target was sputtered under oxygen ambience on to Si (100) and glass/ITO substrates. The variation of the deposition time, which affected the length, size and patterns of the nanorods, was investigated based on their electrochromic properties. For physical studies, the prepared nanorods were examined by X-ray diffraction and field-emission scanning electron microscopy, which demonstrated moderately ordered nanorods with amorphous phase. The results showed that the length and size of nanorod were increased, in nearly linear order, with increasing the deposition time. For optical characteristics of the prepared films, the UV-Vis spectrophotometry was use to determined their transmission spectra and optical contrasts from the colored and bleached state. The electrochromic properties were also determined from cyclic voltammetry. The results indicated that, because of the optimal relations between the nanostructural length and size, the WO3 nanorods prepared at 75 minutes (approximately 422 nm) yielded the highest optical contrast and electrochromic functions.

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