Effect of power on the structure and property of copper nitride films by DC reactive magnetron sputtering

2009 ◽  
Author(s):  
Xing-Ao Li ◽  
Jian-Ping Yang ◽  
An-You Zuo ◽  
Zuo-Bin Yuan ◽  
Zhu-Lin Weng ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Copper Nitride ◽  
Structure And Property ◽  
Dc Reactive Magnetron Sputtering

Copper nitride films deposited by dc reactive magnetron sputtering

2007 ◽  
Vol 18 (10) ◽  
pp. 1003-1008 ◽  
Author(s):  
K. Venkata Subba Reddy ◽  
A. Sivasankar Reddy ◽  
P. Sreedhara Reddy ◽  
S. Uthanna
Keyword(s):  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Copper Nitride ◽  
Dc Reactive Magnetron Sputtering

Growth of CrNx films by DC reactive magnetron sputtering at constant N2/Ar gas flow

2006 ◽  
Vol 200 (20-21) ◽  
pp. 6047-6053 ◽  
Author(s):  
E. Forniés ◽  
R. Escobar Galindo ◽  
O. Sánchez ◽  
J.M. Albella
Keyword(s):  
Magnetron Sputtering ◽  
Gas Flow ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Ar Gas

Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering

2021 ◽  
Author(s):  
Wuttichai Phae-ngam ◽  
Tossaporn Lertvanithphol ◽  
Chanunthorn Chananonnawathorn ◽  
Rattanachai Kowong ◽  
Mati Horprathum ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Dc Reactive Magnetron Sputtering ◽  
Temperature Deposition
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