Fabrication and Plasmas-Relevant Properties of B4C/Cu Coating FGM

2013 ◽  
Vol 833 ◽  
pp. 257-260
Author(s):  
Chuan Sun ◽  
Yun Kai Li ◽  
Hu Wang ◽  
Chang Chun Ge

in this work, two kinds of boron carbide coating based on copper substrates, which are non-FGM B4C/Cu coating and FGM B4C/Cu coating, have been fabricated successfully. It is found that the chemical sputtering yield of B4C measures by LAS2000 apparatus is much lower than that of SMF800 graphite under the conditions of 3keV, 4.6E 15D+ /s/cm2 irradiation, and that FGM-B4C coating has much better performance than non-FGM-B4C coating in thermal shock tests. Thermal desorption performance and physical sputtering damage after plasma irradiation are also evaluated.

2017 ◽  
Vol 857 ◽  
pp. 012003
Author(s):  
L B Begrambekov ◽  
A V Grunin ◽  
N A Puntakov ◽  
Ya A Sadovskiy ◽  
N S Utkov

2009 ◽  
Vol 390-391 ◽  
pp. 996-999 ◽  
Author(s):  
O.I. Buzhinskij ◽  
V.A. Barsuk ◽  
V.G. Otroshchenko

1988 ◽  
Vol 129 ◽  
Author(s):  
Christoph Steinbruchel

ABSTRACTA variety of data for physical etching (i.e. sputtering) and for ion-enhanced chemical etching of Si and SiO2 is analyzed in the very-low-ion-energy regime. Bombardment by inert ions alone, by reactive ions, and by inert ions in the presence of reactiveneutrals is considered. In all cases the etch yield follows a square root dependence on the ion energy all the way down to the threshold energy for etching. At the same time, the threshold energy has a non-negligible effect on the etch yield even at intermediate ion energies. The difference between physical and ion-enhanced chemical etch yields can be accounted for by a reduction in the average surface binding energy of the etch products and a corresponding reduction in the threshold energy for etching. These results suggest that, in general, the selectivity for ion-enhanced etch processes relative to physical sputtering can be increased significantly at low ion energy.


2005 ◽  
Vol 20 (1) ◽  
pp. 21-30 ◽  
Author(s):  
M. T. Siniawski ◽  
S. J. Harris ◽  
Q. Wang

2004 ◽  
Vol 17 (4) ◽  
pp. 931-937 ◽  
Author(s):  
M. T. Siniawski ◽  
S. J. Harris ◽  
Q. Wang ◽  
Y. -W. Chung ◽  
C. Freyman

Wear ◽  
2001 ◽  
Vol 249 (10-11) ◽  
pp. 1004-1013 ◽  
Author(s):  
Stephen J. Harris ◽  
Gordon Krauss ◽  
Matthew T. Siniawski ◽  
Qian Wang ◽  
Shuangbiao Liu ◽  
...  

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