Influence of Coating Process Parameters on the Mechanical and Tribological Properties of Thin Films

Titanium carbonitride (TiCN) thin films with differing C content were deposited by cathodic arc evaporation of pure Ti in a gas composite environment of N2 and C2H2. Scanning electron microscopy (SEM), scratch test, mechanical profilometer and “ball-on-disc” tribometer methods were used to characterize the surface, the coefficient of friction (CoF) of the TiCN thin films and the evaluated wear. An increase of the C2H2 fraction in the gas environment leads to a continuous increase in the deposition rate of the TiCN thin films, as well as an increase in the adhesion of the films to the substrate and the values of the CoF. Tribological test results (when tested against Si3N4 balls) show an increase in the friction coefficient of the TiCN from 0.08 to 0.32, with increasing carbon concentration in the film. The CoF decreases rapidly to 0.06 at a C content of 20.6 at.%, N 38.4 at.% and Ti 41.0 at.%.