Effect of Carbon Black Addition on Reaction-Bonded Silicon Carbide Ceramics
2005 ◽
Vol 287
◽
pp. 189-193
◽
Keyword(s):
High strength reaction-bonded silicon carbide ceramics was successfully produced by reducing the amount of residual silicon and the silicon pocket size with carbon black as an additional carbon source. A prototype of wafer carrier was also produced in near-net dimension by planar contact infiltration of molten silicon into a preform joined with six pieces of simple shape by eliminating process shrinkages. Forming shrinkages were decreased to a negligible level by compression molding, while sintering shrinkage was eliminated by reactive infiltration of molten silicon.
2008 ◽
Vol 587-588
◽
pp. 67-71
◽
2004 ◽
Vol 85
(11)
◽
pp. 2852-2854
◽
2012 ◽
Vol 457-458
◽
pp. 422-426
2014 ◽
Vol 34
(3)
◽
pp. 837-840
◽
Keyword(s):
Keyword(s):
2013 ◽
Vol 39
(1)
◽
pp. 841-845
◽
Keyword(s):
2004 ◽
Vol 24
(15-16)
◽
pp. 3795-3800
◽
1989 ◽
Vol 97
(1131)
◽
pp. 1348-1353