Straightness Error Compensation for Ultra-Precision Machining Based on a Straightness Gauge

2008 ◽  
Vol 381-382 ◽  
pp. 105-108 ◽  
Author(s):  
Guo Hui Cao ◽  
Yoshiharu Namba
Keyword(s):  
Machine Tool ◽  
Error Compensation ◽  
Surface Profile ◽  
Displacement Sensor ◽  
Precision Machining ◽  
The Real ◽  
Nano Scale ◽  
Nc Program ◽  
Ultra Precision ◽  
Straightness Error

A method of straightness error compensation is presented, which is used in ultra-precision machining with nano-scale accuracy for a large mandrel manufacture. A set of measurement system in situ is developed, in which an ultra-smooth glass-ceramic flatness gauge and a non-contact micro displacement sensor with nano-scale resolution were used as a reference and sensor to get the straightness error of machine tool movement. The real straightness error can be obtained after subtracting the surface profile of the gauge from the original straightness error curve. Based on the real straightness error data, a new NC program was made for compensating the error from the axis movement of machine tool. As a result, after straightness error compensation, the straightness errors of two axes of ultra-precision machine tool are 68nm/400mm and 54nm/300mm respectively.

Development of On-Machine Measurement System Utilizing Line Laser Displacement Sensor

2011 ◽  
Vol 5 (5) ◽  
pp. 708-714 ◽  
Author(s):  
Go Abe ◽  
◽  
Masatoshi Aritoshi ◽  
Tomoki Tomita ◽  
Keiichi Shirase ◽  
...  
Keyword(s):  
Machine Tool ◽  
Precision Measurement ◽  
Error Compensation ◽  
Point Method ◽  
Displacement Sensor ◽  
Precision Machining ◽  
Laser Displacement Sensor ◽  
Cnc Machine ◽  
Machining Error ◽  
Measurement Device

Demand for precision machining of dies and molds with complex shapes has been increasing. Though high performance CNC machine tools are widely utilized for precision machining, machining error compensation is still necessary to meet accuracy requirements. For precision measurement, a workpiece must usually be unloaded from a CNC machine tool. Then, the workpiece is measured by a precision measurement device, such as 3D CMM. After the machining error is clarified according to the measurements taken, the workpiece must be re-clamped for the necessary error compensation machining. This error compensation machining is costly and time consuming, and it requires a highly skilled machinists. The re-clamping of the workpiece also causes positioning errors. Therefore, demands for on-machinemeasurement have been increasing. In this paper, an on-machine measurement device that consists of a line laser displacement sensor is developed. This measurement device, attached to the spindle head of a machine tool with magnetic clamps, has special features, such as noncontact, multi-point, high-speed measurement capabilities. Additionally, a sequential multi-point method, an extension of the two-point method, is applied for shape measurement accuracy.

Behavior Characteristics of Nano-Stage According to Hinge Structure

2007 ◽  
Vol 7 (11) ◽  
pp. 4146-4149 ◽  
Author(s):  
Hyun-Seong Oh ◽  
Sung-Jun Lee ◽  
Yong-Woo Kim ◽  
Deug-Woo Lee
Keyword(s):  
Optical Systems ◽  
Precision Machining ◽  
System Control ◽  
Nano Scale ◽  
Composite Joint ◽  
Ultra Precision ◽  
Probe Microscope ◽  
Motion Stage ◽  
Scale Motion ◽  
Behavior Characteristics

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.

A kinematics and experimental analysis of form error compensation in ultra-precision machining

2008 ◽  
Vol 48 (12-13) ◽  
pp. 1408-1419 ◽  
Author(s):  
L.B. Kong ◽  
C.F. Cheung ◽  
S. To ◽  
W.B. Lee ◽  
J.J. Du ◽  
...  
Keyword(s):  
Experimental Analysis ◽  
Error Compensation ◽  
Precision Machining ◽  
Form Error ◽  
Ultra Precision

Reconstructing NC Program-Based Geometrical Error Compensation for Heavy-Duty NC Machine Tool

2011 ◽  
Vol 314-316 ◽  
pp. 2082-2086 ◽  
Author(s):  
Yong Lu ◽  
Jian Guang Li ◽  
Dong Gao ◽  
Feng Zhou
Keyword(s):  
Machine Tool ◽  
Error Compensation ◽  
Heavy Duty ◽  
Basic Algorithm ◽  
Nc Machine Tool ◽  
Compensation Algorithm ◽  
Movement Error ◽  
Nc Program ◽  
Nc Machine ◽  
Circular Interpolation

Heavy-duty NC machine tool is difficult and costly to evidently improve their precision via manufacturing technology only. It is proved being an effective approach to improve machine tool manufacturing precision based on software error compensation. In this paper, an error compensation algorithm based on reconstructing NC program is discussed. Following comprehensive discussion on basic algorithm of positioning error compensation in detail, linear interpolation and circular interpolation movement error compensation algorithm are further sketched in brief. To decrease the machining error, NC program is reconstructed before actual machining. The experiment results show that error compensation methods based on reconstructing NC program can improve profile accuracy of heavy-duty NC machine tools obviously.

Machine Integrated Measurement of Ultra Precision Machined Specular Non-Rotational Symmetrical Surfaces

2014 ◽  
Vol 907 ◽  
pp. 277-289 ◽  
Author(s):  
Eckart Uhlmann ◽  
Gerhard Häusler ◽  
Christian Röttinger ◽  
Evelyn Olesch ◽  
Christian Faber ◽  
...  
Keyword(s):  
Machine Tool ◽  
Optical Measurement ◽  
Installation Space ◽  
Precision Machining ◽  
Test Surface ◽  
Full Field ◽  
Rotationally Symmetric ◽  
Ultra Precision ◽  
Height Data

In this paper, current results of a research project combining ultra precision machining and optical measurement are presented. The goal is to improve the quality of specular freeform surfaces manufactured by ultra precision slow slide servo turning by running appropriate correction cycles on the basis of machine integrated measurements. These measurements are conducted using the principle of Phase Measuring Deflectometry (PMD) in order to optically acquire full-field 3D-height data. For this purpose, a special setup the so called Mini PMD that can be operated within the limited installation space of an ultra precision machine tool has been designed and implemented. Results of machine integrated measurements of a specular non-rotational symmetrical surface are presented. Furthermore, using Mini PMD and a rotationally symmetric test surface, a complete correction cycle is demonstrated without the necessity of taking the workpiece off the machine for measurement.

Behavior Characteristics of Nano-Stage According to Hinge Structure

2007 ◽  
Vol 7 (11) ◽  
pp. 4146-4149
Author(s):  
Hyun-Seong Oh ◽  
Sung-Jun Lee ◽  
Yong-Woo Kim ◽  
Deug-Woo Lee
Keyword(s):  
Optical Systems ◽  
Precision Machining ◽  
System Control ◽  
Nano Scale ◽  
Composite Joint ◽  
Ultra Precision ◽  
Probe Microscope ◽  
Motion Stage ◽  
Scale Motion ◽  
Behavior Characteristics

Nano-stages are used in many ultra-precision systems, such as scanning probe microscope (SPM), optical fiber aligners, ultra-precision cutting, measuring and optical systems. Generally, ultra-precision machining and measuring are achieved using a nano-scale motion stage actuated using Piezo-electric actuators (PZT), and the importance of and demands for the motion stage increase with the need to improve system performance and accuracy. However, it is difficult to find solutions because the performance and characteristics of nano-scale motion stages are determined by various factors, such as the hinge structure, actuator, and method of system control. This paper focuses on improving of leafspring and planar joint hinges, and suggests a composite joint hinge stage.

Finite Element Analysis and Optimization of Thermal Deformation of Resin Concrete Manufacturing Bases

2014 ◽  
Vol 543-547 ◽  
pp. 4010-4013
Author(s):  
Yao Chen ◽  
Xiu Xia Liang ◽  
Shuang Qiu
Keyword(s):  
Thermal Stability ◽  
Machine Tool ◽  
Thermal Deformation ◽  
Precision Machining ◽  
Element Analysis ◽  
Excellent Thermal Stability ◽  
Good Thermal Stability ◽  
Machining Center ◽  
Ultra Precision ◽  
Thermal Stability Of

Resin concrete generally has good mechanical properties, excellent thermal stability and great vibration resistance, the model of the ultra-precision machining center bed is established to study the thermal stability of the resin concrete using virtual reality and collaborative simulation technology based on Pro/E and ANSYS Workbench. The main factors that affect the machine tool bed thermal deformation were found through analyzing the deformation results and the materials and restrain conditions were optimized. The results proved that the optimized machine tool bed has good thermal stability and theoretical basis was provided to improve the thermal stability of the ultra-precision machining centers.

Nano Positioning Control for Ultra-Precision Machining Using Inverse Hysteresis Model

2010 ◽  
Vol 123-125 ◽  
pp. 735-738
Author(s):  
Lee Ku Kwac ◽  
Hong Gun Kim
Keyword(s):  
Feedback Control ◽  
Input Voltage ◽  
Tracking Performance ◽  
Precision Machining ◽  
Hysteresis Model ◽  
Machining Performance ◽  
Movement Error ◽  
Ultra Precision ◽  
Straightness Error ◽  
Inverse Hysteresis

In this study, inverse-hysteresis model, which can inversely calculate input voltage for desired displacement, is suggested for tracking performance. In this paper, tracking performance and movement precision of piezoelectric actuator as operating parts of ultra-precision cutting unit is improved using feedback control of inverse-hysteresis model to remove hysteresis property. PID feedback control is studied as controller to compensate the error in inverse-hysteresis model. In addition, straightness error of spindle, thermal expansion error of mechanical structure is analyzed to detect movement error property in ultra-precision machining. Via machining performance evaluation using ultra-precision machining experiments, the machining precision of ultra-precision CNC lathe can be improved.

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