Machine Integrated Measurement of Ultra Precision Machined Specular Non-Rotational Symmetrical Surfaces

2014 ◽  
Vol 907 ◽  
pp. 277-289 ◽  
Author(s):  
Eckart Uhlmann ◽  
Gerhard Häusler ◽  
Christian Röttinger ◽  
Evelyn Olesch ◽  
Christian Faber ◽  
...  
Keyword(s):  
Machine Tool ◽  
Optical Measurement ◽  
Installation Space ◽  
Precision Machining ◽  
Test Surface ◽  
Full Field ◽  
Rotationally Symmetric ◽  
Ultra Precision ◽  
Height Data

In this paper, current results of a research project combining ultra precision machining and optical measurement are presented. The goal is to improve the quality of specular freeform surfaces manufactured by ultra precision slow slide servo turning by running appropriate correction cycles on the basis of machine integrated measurements. These measurements are conducted using the principle of Phase Measuring Deflectometry (PMD) in order to optically acquire full-field 3D-height data. For this purpose, a special setup the so called Mini PMD that can be operated within the limited installation space of an ultra precision machine tool has been designed and implemented. Results of machine integrated measurements of a specular non-rotational symmetrical surface are presented. Furthermore, using Mini PMD and a rotationally symmetric test surface, a complete correction cycle is demonstrated without the necessity of taking the workpiece off the machine for measurement.

Finite Element Analysis and Optimization of Thermal Deformation of Resin Concrete Manufacturing Bases

2014 ◽  
Vol 543-547 ◽  
pp. 4010-4013
Author(s):  
Yao Chen ◽  
Xiu Xia Liang ◽  
Shuang Qiu
Keyword(s):  
Thermal Stability ◽  
Machine Tool ◽  
Thermal Deformation ◽  
Precision Machining ◽  
Element Analysis ◽  
Excellent Thermal Stability ◽  
Good Thermal Stability ◽  
Machining Center ◽  
Ultra Precision ◽  
Thermal Stability Of

Resin concrete generally has good mechanical properties, excellent thermal stability and great vibration resistance, the model of the ultra-precision machining center bed is established to study the thermal stability of the resin concrete using virtual reality and collaborative simulation technology based on Pro/E and ANSYS Workbench. The main factors that affect the machine tool bed thermal deformation were found through analyzing the deformation results and the materials and restrain conditions were optimized. The results proved that the optimized machine tool bed has good thermal stability and theoretical basis was provided to improve the thermal stability of the ultra-precision machining centers.

Micro-Quality Control on Ultra-Precision Machining of Sapphire Substrates

2010 ◽  
Vol 102-104 ◽  
pp. 738-741
Author(s):  
Hai Zhou ◽  
Li Gang Bai ◽  
Dai Pin Wang
Keyword(s):  
Surface Roughness ◽  
Ph Value ◽  
Diamond Wheel ◽  
Precision Machining ◽  
New Approach ◽  
Sapphire Substrates ◽  
Ductile Mode ◽  
Ultra Precision ◽  
Main Factors

This paper proposed a new approach to control the micro-quality of sapphire substrate, in order to grow GaN on substrate. The main factors that influence macro-quality are the method of slicing, grinding and polishing. Thread speed of slicing is less than 0.5m/s. Ductile mode grinding of substrate is achieved by #3000 diamond wheel and feed of 1μm/r. The suitable polishing conditions are that the SiO2 grain size is less than 10nm, the concentration SiO2 is 3％, pH value of polishing liquid is 10.5 and polishing stress is 190Pa. The undamaged substrates have been obtained steadily. The surface roughness RMS is less than 0.4 nm.

Research on Precision Mirror Machining Technology for W-Mo Alloy

2011 ◽  
Vol 487 ◽  
pp. 303-307
Author(s):  
Jia Liang Guan ◽  
H.W. Lu ◽  
X.H. Xiao ◽  
Y.C. Wu ◽  
Z.D. Chen
Keyword(s):  
Surface Quality ◽  
Formation Mechanism ◽  
Rotational Speed ◽  
Precision Machining ◽  
Work Piece ◽  
Mirror Surface ◽  
Precision Grinding ◽  
Elid Grinding ◽  
Ultra Precision

A new way of precision machining was studied through the experiments of Electrolytic In-Process Dressing (ELID) precision grinding and ultra precision lapping and polishing for W-Mo metal alloy. First a 22nm(Ra) surface was obtained through the ELID grinding, last a 11nm(Ra) surface was obtained after the process of lapping and polishing with 0.1～0.3 N/cm2pressure, 60～100 r/min rotational speed and other optimized parameters. Meanwhile, the formation mechanism of ultra precision mirror surface of the alloy was also analyzed. The experiments prove surface quality of the work piece was guaranteed by ELID grinding, and which was also greatly affected by some parameters in lapping and polishing such as pressure, rotational speed.

New Daylight Panel Design Using Ultra-Precision Machining

2009 ◽  
Vol 3 (1) ◽  
pp. 89-98 ◽  
Author(s):  
Jian-Shian Lin ◽  
◽  
Wei-Lun Tai ◽  
Chieh-Lung Lai ◽  
Yoshimi Takeuchi ◽  
...  
Keyword(s):  
Optical Measurement ◽  
Precision Machining ◽  
Environment Friendly ◽  
Measurement Results ◽  
Ultra Precision ◽  
Panel Design

The daylight panel design we introduce increases inner wall illumination by 20% and improves daytime lighting efficiency. The three panel structures we simulated and manufactured are plain, triangular, and rhombic. Simulation and optical measurement results show that the rhombic structured panel uses daylight most efficiently. Our microstructured daylight panel increases building illumination and uniformity, reduces lighting-fixture glare, and saves energy, making it environment-friendly.

Fluctuation prediction of machining accuracy for multi-axis machine tool based on stochastic process theory

2014 ◽  
Vol 229 (14) ◽  
pp. 2534-2550 ◽  
Author(s):  
Qiang Cheng ◽  
Qiunan Feng ◽  
Zhifeng Liu ◽  
Peihua Gu ◽  
Ligang Cai
Keyword(s):  
Stochastic Process ◽  
Machine Tool ◽  
Significant Influence ◽  
Geometric Error ◽  
Error Modeling ◽  
Precision Machining ◽  
Machining Accuracy ◽  
Geometric Errors ◽  
Volumetric Error ◽  
Ultra Precision

Geometric error has significant influence on the processing results and reduces machining accuracy. Machine tool geometric errors can be interpreted as a deterministic value with an uncertain fluctuation of probabilistic distribution. Although, the uncertain fluctuation can not be compensated, it has extremely profound significance on the precision and ultra-precision machining to reduce the fluctuation range of machining accuracy as far as possible. In this paper, a typical 3-axis machine tool with high precision is selected and the fluctuations in machining accuracy are studied. The volumetric error modeling of machine tool is established by multi-body system (MBS) theory, which describes the topological structure of MBS in a simple and convenient matrix form. Based on the volumetric error model, the equivalent components of the errors for the three axes are established by reducing error terms. Then, the fluctuations of equivalent errors and the machining accuracy in working planes are depicted and predicted using the theory of stochastic process, whose range should be controlled within a certain confidence interval. Furthermore, the critical geometric errors that have significant influence on the machining accuracy fluctuation are identified. Based on the analysis results, some improvement in the machine tool parts introduced and the results for the modified machine show that the prediction allow for reduction in errors for the precision and ultra-precision machining.

scholarly journals Surface and Subsurface Quality Assessment of Polished Lu2O3 Single Crystal Using Quasi-Brewster Angle Technique

2021 ◽  
Vol 9 ◽  
Author(s):  
Chengyuan Yao ◽  
Wanfu Shen ◽  
Xiaodong Hu ◽  
Chunguang Hu
Keyword(s):  
Single Crystal ◽  
High Sensitivity ◽  
Brewster Angle ◽  
Precision Machining ◽  
Polished Surface ◽  
Processing Scheme ◽  
Optical Profilometer ◽  
Ultra Precision ◽  
Consistency Of The Test

The sesquioxide Lu2O3 single crystal has attracted tremendous attention as potential host material for high-power solid-state lasers. As polishing is the terminal process of conventional ultra-precision machining, the quality of polished crystal directly impacts the crucial performance indicators of optics. The high melting point of Lu2O3 single crystal makes crystal preparation difficult. Therefore, investigations on the surface/subsurface quality inspection of polished Lu2O3 single crystal are scarce. In this paper, we utilize the quasi-Brewster angle technique (qBAT) based on ellipsometry to inspect the quality of polished Lu2O3 single crystal, achieving fast, non-destructive, and high-sensitive surface/subsurface damage assessment. A systematic crystal processing scheme is designed and polished Lu2O3 crystal samples are obtained. To verify the results of qBAT, the surface and subsurface quality are tested using optical profilometer and transmission electron microscope, respectively. The consistency of the test results demonstrates the feasibility, high sensitivity, and accuracy of the qBAT. To our knowledge, this is the first time that the qBAT is applied to investigate the polished surface/subsurface quality of Lu2O3 single crystal. In conclusion, this method provides a powerful approach to the high-precision characterization of the surface/subsurface quality of Lu2O3 single crystal, and has significant potential for material property study and process optimization during ultra-precision machining.

Study on Axial Oil Chamber Design for High Performance Hydrostatic Spindle

2014 ◽  
Vol 701-702 ◽  
pp. 869-873
Author(s):  
Shao Hsien Chen ◽  
Shang Te Chen ◽  
Chien Cheng Hsu
Keyword(s):  
Machine Tool ◽  
High Performance ◽  
Development Trend ◽  
Ball Screw ◽  
Precision Machining ◽  
Large Size ◽  
Chamber Design ◽  
Ultra Precision ◽  
Bearing Stiffness ◽  
Application Scope

Ultra-precision machining and large-size equipments are themostprimary development trend ofcurrentmachine tooland hydrostatic products arekeytechnologiesof ultra-precision machining equipments. However, these equipmentsmostlyprocess miniature components, thus the adopted tools are relatively small and the spindlesare mainlybuilt-in types of HSK32-HSK25 withover30,000r. Some processing equipments are even equipped with hydrostatic or gas-static spindles. The studyextends theaxialoilchamberto radialonesto expand theaction areaofaxialoil pressureand form a closed oil seal edge by combining theradialclearance. Consequently, theaxialbearing stiffnesscan be enhancedtoenlarge the application scope of hydrostatic spindle. The designmodecan enhanceaxialstiffness ofspindle modulesor strengthenthe stiffness of hydrostatic spindlein a ball screw.

Research on Influence of the Material Anisotropy to the Surface Quality during SPDT Machining of Crystal KDP

2006 ◽  
Vol 532-533 ◽  
pp. 209-212 ◽  
Author(s):  
Ming Jun Chen ◽  
Ying Chun Liang ◽  
Jing He Wang ◽  
Xin Zhou Zhang
Keyword(s):  
Theoretical Analysis ◽  
Machine Tool ◽  
Cutting Force ◽  
Surface Quality ◽  
Smooth Surface ◽  
Precision Machining ◽  
Optimal Parameters ◽  
Material Anisotropy ◽  
Crystal Anisotropy ◽  
Ultra Precision

A theoretical analysis on the variation regularity of cutting force caused by the material anisotropy with different orientation of KDP is analyzed firstly; influence and regularity of the variation are obtained. Analysis result shows that the crystal anisotropy of KDP is an important factor in obtaining the super-smooth surface. Then experiments are realized on the machine tool, results afford the variation regularity of cutting force caused by the anisotropy with different orientation of KDP, which certifies the correctness of this theoretical analysis. For ultra-precision machining of the KDP at large negative rake diamond cutter (-45°) and the optimal parameters, the super-smooth surface (rms is 8.702 nm, Ra is 6.895 nm) can be obtained on the plane (001).

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