Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator
Keyword(s):
This paper is focused on the finite element analysis (FEA) and theoretical calculation of vibration characterization of V-shaped electrothermal microactuator. A vibration mechanical model about V-shaped electrothermal microactuator is presented. By having a comparison between FEA and theoretical calculation about natural frequencies of V-shaped electrothermal microactuator, the maximum error is within 0.19 %. This paper also analyzes the influences of microactuator geometric parameters on natural frequency. The length and thickness have larger effect on the natural frequency of the actuator, while the angle and width have less effect on the natural frequency.
2012 ◽
Vol 21
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pp. 096369351202100
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