Modeling and Analysis of Material Removal Characteristics in Silicon Wafer Double Side Polishing

2012 ◽  
Vol 516 ◽  
pp. 384-389
Author(s):  
Sang Jik Lee ◽  
Hyoung Jae Kim ◽  
Hae Do Jeong
Keyword(s):  
Integrated Circuits ◽  
Process Parameters ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Thickness Variation ◽  
Modeling And Analysis ◽  
Profile Variation ◽  
Friction Energy ◽  
Wafer Edge

As advancing technologies increase the demand for yield and planarity in integrated circuits, wafers have become larger and their specifications more stringent. Flatness, thickness variation and nanotopography have emerged as important concerns in the wafering process. Double side polishing has been adopted as a solution to these problems. This paper focuses on the material removal characteristics and wafer profile variation during Si double side polishing. A polishing experiment to investigate Si removal characteristics according to process parameters was carried out in a single head rotary polisher equipped with a monitoring system for friction force. It was found that the material removal rate is related to friction energy rate, and the polishing state was transited and divided into three conditions according to pressure. On the basis of the experimental results, the wafer profile variation in double side polishing was modelled and simulated according to pressure. The friction energy was calculated to find the material removal amount across the wafer. With the conversion of calculated friction energy to the material removal amount, wafer profile variation was simulated. As a result, the wafer profile variation and its range were increased with a pressure increase, and originated from the position near the wafer edge.

Modeling and Analysis of Process Parameters on State Variables in WEDM of TiB2 Nanocomposite Ceramic

2010 ◽  
Vol 34-35 ◽  
pp. 631-635 ◽  
Author(s):  
M. Reza ◽  
Soleymani Yazdi ◽  
Hoseyn Dehghan ◽  
Hoda Amini
Keyword(s):  
Neural Network ◽  
Surface Roughness ◽  
Process Parameters ◽  
Material Removal Rate ◽  
Material Removal ◽  
Electrical Discharge Machining ◽  
Removal Rate ◽  
State Variables ◽  
Influence Of Process Parameters ◽  
Modeling And Analysis

The main objective of the present research is to find the influence of process parameters on the state variables (i.e., surface roughness and material removal rate) in Wire Electrical Discharge Machining (WEDM) of Titanium Diboride (TiB2) nanocomposite ceramics. This work adopted an L32 orthogonal array based on Taguchi method for design of experiments. Statistically evaluating the obtained data is carried out by using the analysis of variance, signal to noise and artificial neural network techniques. Then, the effects of process parameters on the surface roughness and material removal rate are studied. Finally, the Multilayer Perceptron (MLP) neural network is used to model the WEDM of TiB2 nanocomposite ceramic. The obtained results have demonstrated very good modeling capacity of the proposed neural network. Furthermore, analyses have appropriately presented the influence of process parameters on state variables.

Investigation of the Spark Cycle Effect on Material Removal Rate in Wire Electrical Discharge Machining

Manufacturing ◽  
2003 ◽  
Author(s):  
Scott F. Miller ◽  
Albert J. Shih
Keyword(s):  
Process Parameters ◽  
Material Removal Rate ◽  
Electrical Discharge ◽  
Material Removal ◽  
Electrical Discharge Machining ◽  
Removal Rate ◽  
Short Circuit ◽  
Wire Electrical Discharge Machining ◽  
Time Duration ◽  
Edm Process

The development of new, advanced engineering materials and the needs for precise and flexible prototype and low-volume production have made wire electrical discharge machining (EDM) an important manufacturing process to meet such demand. This research investigates the effect of spark on-time duration and spark on-time ratio, two important EDM process parameters, on the material removal rate (MRR) and surface integrity of four types of advanced material: porous metal foams, metal bond diamond grinding wheels, sintered Nd-Fe-B magnets, and carbon-carbon bipolar plates. An experimental procedure was developed. During the wire EDM, five types of constraints on the MRR due to short circuit, wire breakage, machine slide speed limit, and spark on-time upper and lower limits have been identified. An envelope of feasible EDM process parameters is created and compared across different work-materials. Applications of such process envelope to select process parameters for maximum MRR and for machining of micro features are presented.

Influence of Process Parameters on Electrochemical Micromachining of Nimonic 75 Alloy

2017 ◽  
Author(s):  
Hariharan Perianna Pillai ◽  
Shamli Chinnakulanthai Sampath ◽  
Rajkeerthi Elumalai ◽  
Shruthilaya Hariharan ◽  
Yuvaraj Natarajan
Keyword(s):  
Process Parameters ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Cycle Performance ◽  
Electrochemical Micromachining ◽  
Influence Of Process Parameters ◽  
Micro Hole ◽  
Micro Tool ◽  
Nimonic 75

Electrochemical micromachining process is one among the successful micromachining technique, which uses the electrochemical energy and is recognized for machining difficult-to-cut materials. One such material is Nimonic 75 alloy, which is used to make gas turbine components. In this study, an effort has been made to machine micro-hole profiles in Nimonic 75 with a thickness of 500 μm using two different electrolytes. A combination of sodium bromide, hydrofluoric acid and ethylene glycol has been chosen as the first electrolyte, while the second is a combination of sodium chloride and sodium nitrate. Solid tungsten carbide of diameter 500 μm is used as the tool in each case. For layout of experiments, Taguchi orthogonal array was chosen with following input parameters namely voltage, micro-tool feed rate and duty cycle. Performance characteristics such as material removal rate, overcut and conicity have been assessed for each electrolyte. Experimental results have shown that the first electrolyte yields lower values of overcut (OC) and conicity, whereas the second electrolyte gives higher material removal rate (MRR). Further, the optimal combinations of process parameters have been found by implementing the TOPSIS procedure and the results were found to be in good agreement with the experimental outcomes.

Optimization of Process Parameters in Plasma Arc Cutting Applying Genetic Algorithm and Fuzzy Logic

2018 ◽  
pp. 123-139
Author(s):  
Nehal Dash ◽  
Apurba Kumar Roy ◽  
Sanghamitra Debta ◽  
Kaushik Kumar
Keyword(s):  
Genetic Algorithm ◽  
Surface Roughness ◽  
Fuzzy Logic ◽  
Process Parameters ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Plasma Arc ◽  
Plasma Arc Cutting ◽  
Optimization Of Process Parameters

Plasma Arc Cutting (PAC) process is a widely used machining process in several fabrication, construction and repair work applications. Considering gas pressure, arc current and torch height as the inputs and among all possible outputs, in the present work Material Removal Rate and Surface Roughness would be considered as factors that determines the quality, machining time and machining cost. In order to reduce the number of experiments Design of Experiments (DOE) would be carried out. In later stages applications of Genetic Algorithm (GA) and Fuzzy Logic would be used for Optimization of process parameters in Plasma Arc Cutting (PAC). The output obtained would be minimized and maximized for Surface Roughness and Material Removal Rate respectively using Genetic Algorithm (GA) and Fuzzy Logic.

Effect of WEDM process parameters on machinability of Nimonic75 alloy using brass wire

2020 ◽  
Vol 17 (3) ◽  
pp. 389-397
Author(s):  
Harvinder Singh ◽  
Vinod Kumar ◽  
Jatinder Kapoor
Keyword(s):  
Process Parameters ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Cutting Speed ◽  
Content Type ◽  
Response Characteristics ◽  
Nickel Based Alloy ◽  
Pulse On Time ◽  
Pulse Off Time

Purpose This study aims to investigate the influence of process parameters of wire electrical discharge machining (WEDM) of Nimonic75. Nimonic75 is a Nickel-based alloy mostly used in the aerospace industry for its strength at high temperature. Design/methodology/approach One factor at a time (OFAT) approach has been used to perform the experiments. Pulse on time, pulse off time, peak current and servo voltage were chosen as input process parameters. Cutting speed, material removal rate and surface roughness (Ra) were selected as output performance characteristics. Findings Through experimental work, the effect of process parameters on the response characteristics has been found. Results identified the most important parameters to maximize the cutting speed and material removal rate and minimize Ra. Originality/value Very limited research work has been done on WEDM of Nickel-based alloy Nimonic75. Therefore, the aim of this paper to conduct preliminary experimentation for identifying the parameters, which influence the response characteristics such as material removal rate, cutting speed, Ra, etc. during WEDM of Nickel-based alloy (Nimonic75) using OFAT approach and found the machinability of Nimonic75 for further exhaustive experimentation work.

Multi Response Optimization of Process Parameters of Abrasive Water Jet Machining for Stainless Steel AISI 304 Using VIKOR Approach Coupled with Signal to Noise Ratio Methodology

2015 ◽  
Vol 14 (02) ◽  
pp. 107-121 ◽  
Author(s):  
Vedansh Chaturvedi ◽  
Diksha Singh
Keyword(s):  
Surface Roughness ◽  
Process Parameters ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Aisi 304 ◽  
Steel Aisi ◽  
Machining Characteristics ◽  
Stainless Steel Aisi ◽  
Experimental Runs

As the population of the world is continuously increasing, demand of the mechanical manufactured products is also increasing. Machining is the most important process in any mechanical manufacturing, and in machining two factors, i.e. material removal rate (MRR) and surface roughness (SR) are the most important responses. If the MRR is high, the product will get desired shape in minimum time so the production rate will be high, but we could not scarify with the surface finishing also because in close tolerance limit parts like in automobile industry, if the surface is rough exact fit cannot take place. The term optimization is intensively related to the field of quality engineering. Abrasive water jet machining is an important unconventional machining, in order to obtain better response, i.e. material removal rate and surface roughness. Various process parameters of AWJM need to be observed and selected to improve machining characteristics. Better machining characteristics can be achieved by optimizing various process parameters of AWJM. This study considers four process control parameters such as transverse speed, standoff distance, abrasive flow rate and water pressure. The response is taken to be material removal rate and surface roughness. The work piece for stainless steel AISI 304 material of size 15 cm × 10 cm × 2 cm is selected for experiments. Sixteen experimental runs (two trials for each experimental runs) were carried out for calculating MRR and SR and average value of these two trials have been taken for analysis. MRR is normalized according to higher-is-better and SR is normalized according to lower is better. The experiment data analysis is done and VIKOR index is found. Finally, the analysis of VIKOR index using S/N ratio is done and found the most significant factor for AWJM and predicted optimal parameters setting for higher material removal rate and lower surface roughness. Verification of the improvement in quality characteristics has been made through confirmation test with the predicted optimal parameters setting. It is found that the determined optimum combination of AWJM parameters gives the lowest VIKOR INDEX which shows the successful implementation of VIKOR Method coupled with S/N ratio in AWJM.

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