A PDMS Micropump for Implantable Drug Delivery Application
This paper presents an integrated magnetic PDMS micropump for implantable drug delivery application. The micropump mainly consists of two structural PDMS layers: a PDMS functional layer that incorporates microchannels, a pump chamber and two planar check valves into a single layer, allowing for simple design and easy system integration, and the other PDMS membrane layer covering the pump chamber and holding a thin electroplated permalloy piece on top for magnetic actuation. The micropump can be driven by the interaction between the ferromagnetic permalloy and an external electromagnet, providing a remote and wireless operation method. Test results demonstrate that this micropump is able to produce a maximal flow rate of 0.15 μL/min at the driving frequency of 2 Hz with a volume resolution of approximately 1 nL per stroke, promising its application in various implantable biomedical systems.