Effect of Humidity and Bias on the Size of Nanostructures Fabricated by STM Anodization and its Application to Patterns
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In this paper, the effect of humidity and sample bias on the size of nanostructures fabricated by STM anodization on a 3 nm-thick Ti film was investigated by random nano-arrays. 3.5 V and 4 V bias were applied to samples at a relative humidity of ~30% while 3.5 V, 4 V and 4.5 V were applied to samples at a relative humidity of ~43%. According to the cross section analyses, dots scattered randomly on surfaces became larger and higher as the bias increased at a constant relative humidity or as the relative humidity increased at the same bias. Two complicated patterns were fabricated by running a program in which the movement of STM tip and the sample bias were defined.
2021 ◽
Vol 03
(05)
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pp. 28-35
1998 ◽
Vol 05
(03n04)
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pp. 797-802
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1973 ◽
Vol 31
◽
pp. 698-699
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1972 ◽
Vol 30
◽
pp. 568-569
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