TEM Observation of the Polytype Transformation of Bulk SiC Ingot
2008 ◽
Vol 600-603
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pp. 365-368
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Keyword(s):
This article describes the analysis of the polytype transformation of SiC ingot. We analyzed the sample by Raman spectroscopy and TEM observation. The result of the analysis shows the polytype is transformed from 4H-SiC to 6H-SiC, and then returned to 4H-SiC. We found that the direction of the c-axis is not the same as the growth direction of the ingot. And also we found the existence of 8H-SiC at the interface between 6H-SiC and 4H-SiC region by the selected area diffraction pattern and confirmed it by HR-TEM observation.
1999 ◽
Vol 176
(1)
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pp. 661-664
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1962 ◽
Vol 33
(2)
◽
pp. 246-246
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2009 ◽
Vol 81
(1)
◽
pp. 61-71
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1992 ◽
Vol 50
(1)
◽
pp. 32-33
Keyword(s):
1983 ◽
Vol 41
◽
pp. 322-323