Theoretical Study of N Incorporation Effect during SiC Oxidation
2013 ◽
Vol 740-742
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pp. 455-458
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Keyword(s):
We investigated the atomistic mechanism of N incorporation during SiC oxidation by the first principles calculation. We found that N atoms play two characteristic roles in NO oxidation of SiC surface. One is that N atoms tend to form three-fold coordinated covalent bonds on a SiC(0001) surface, which assist the termination of surface dangling bonds, leading to improve the interface properties. The other is that N atoms form N-N bond like a double bond. The N2 molecule is desorbed from SiC surface, which do not disturb the oxidation process of SiC surfaces. These results indicate that N incorporation is effective to suppress defect state generation at SiO2/SiC interfaces during SiC oxidation.
2020 ◽
Vol 1445
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pp. 012008
Keyword(s):
Keyword(s):
2005 ◽
Vol 108-109
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pp. 193-198
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2011 ◽
Vol 2011
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pp. 1-5
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2016 ◽
Vol 858
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pp. 185-188
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