Purification and Size Control of AlN Powder for AlN Single Crystal Growth

2014 ◽  
Vol 804 ◽  
pp. 107-110 ◽  
Author(s):  
Kang Huk Lee ◽  
Seong Min Jeong ◽  
Woo Teck Kwon ◽  
Soo Ryong Kim ◽  
Dong Geun Shin ◽  
...  

AlN single crystal can be grown by physical vapor transport (PVT) method. The purity and particle size of the source material are important factors for single crystal growth to obtain good quality of AlN single crystal. The aim of this study was purification of AlN powder and growth of its particle size through thermocyclic treatment. The initial particle size was about 1.0 μm and the purity was 98.4% containing 1.6% oxygen and metallic impurities such as Fe, Sn, Ca, Na and Mg etc. which were analyzed based on KSL1612. For purification of AlN powder, it was performed using a thermocycle process with various thermocyclic numbers. After the thermocycle treatment, it is able to obtain large particle size AlN powder as much as 30μm and purity was increased to 99.6% based on chemical analysis.

2001 ◽  
Vol 692 ◽  
Author(s):  
K. Kodera ◽  
A. Kinoshita ◽  
K. Arafune ◽  
Y. Nakae ◽  
A. Hirata

AbstractIt is necessary to clarify the effect of Marangoni convection on single crystal growth from a melt in order to improve the quality of the grown crystal. Particularly, the deviation of crystalmelt (C-M) interface from a planar shape is a major problem because it may deteriorate the quality of the grown crystal. In this paper, we investigated the effect of thermal and solutal Marangoni convection on C-M interface shape in an In-Sb binary system by the horizontal Bridgman (HB) method. The C-M interface concavity strongly depends on the cooling rate and the temperature gradient under uniform concentration distribution conditions in the melt. A large concavity was observed at low cooling rates and high temperature gradient conditions. The concavity was found to be caused by thermal Marangoni convection, by taking Péclet number into account. Then, we varied the composition of the In-Sb binary system to induce solutal Marangoni convection intentionally. The C-M interface was kept planar in case solutal Marangoni convection occurred in the direction opposite to the thermal one. Therefore, we believe that the utilization of solutal Marangoni convection will be a new control technique to make the C-M interface planar for the HB system. From these results, it was clarified that Marangoni convection plays a significant role in the HB crystal growth system.


2019 ◽  
Vol 963 ◽  
pp. 38-41
Author(s):  
Jung Woo Choi ◽  
Jung Gyu Kim ◽  
Byung Kyu Jang ◽  
Sang Ki Ko ◽  
Myung Ok Kyun ◽  
...  

4H-SiC single crystal was successfully grown with source powder modified by the pretreatment process in order to improve polytype stability of SiC crystal. To increase C/Si ratio in SiC source powder, SiC source powder was mixed with liquid carbon source and then pre-heated at 1200°C. SiC single crystal grown with modified source powder exhibited complete 4H polytype and the crystal quality of SiC crystal grown by modified source power was definitely better than conventional source powder


2019 ◽  
Vol 963 ◽  
pp. 46-50
Author(s):  
Jeong Min Choi ◽  
Chae Young Lee ◽  
Dae Sung Kim ◽  
Mi Seon Park ◽  
Yeon Suk Jang ◽  
...  

The present research was focused on the effect of porous graphite plate in TaC-coated crucible on crystal quality and resistivity of semi-insulating SiC crystals. Two SiC crystals grown with/without porous graphite plate in TaC-coated crucible were systematically compared. 6H-SiC polytype was obtained on both crystals regardless of porous graphite plate. The quality of SiC crystal grown using porous graphite plate placed in the TaC-coated crucible was slightly better than SiC crystal without porous graphite plate. SiC crystals having an average resistivity value of about 1×1010 Ωcm were obtained. In the result of COREMA measurement, the use of porous graphite plate tends to obtain wafers with better uniformity in resistivity value.


1988 ◽  
Vol 144 ◽  
Author(s):  
C.J. Palmstrøm ◽  
K.C. Garrison ◽  
B.-O. Fimland ◽  
T. Sands ◽  
R.A. Bartynski

ABSTRACTFilms of CoGa and CoAs have been deposited on Ga1-xAlxAs surfaces. CoAs films were found to be highly textured, but not single crystal. For CoGa films, however, single crystal growth was observed. The crystalline quality of the (100) oriented CoGa was good as determined by Rutherford backscattering with channeling measurements (χmin ∼7%) and cross-sectional transmission electron microscopy. Schottky barrier diodes fabricated from (100)CoGa/Ga1-xAlxAs and CoAs/Ga1-xAlxAs showed good characteristics with low ideality factors, n<1.15. Good Schottky barrier behavior was also found for (100)ErAs/GaAs structures.


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