Ex Situ Bubble Generation, Enhancing the Particle Removal Rate for Single Wafer Megasonic Cleaning Processes

Current work describes development, testing and verification of a single wafer megasonic cleaning method utilizing a transducer design that meets the extreme particle neutrality, Particle Removal Efficiency (PRE), and repeatability requirements of production scale wafer bonding and other applications requiring extremely low particle levels.

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A study on the removal of infinitesimal particles on a wall by high-speed air jet―Measurements of adhesive force and particle removal rate―

Journal of Fluid Science and Technology ◽

10.1299/jfst.2014jfst0032 ◽

2014 ◽

Vol 9 (3) ◽

pp. JFST0032-JFST0032

Author(s):

Kenji KATOH ◽

Sanghyeon SONG ◽

Tatsuro WAKIMOTO ◽

Kazuhiko SOEMOTO ◽

Takamasa YAMASHITA

Keyword(s):

High Speed ◽

Removal Rate ◽

Adhesive Force ◽

Particle Removal ◽

Air Jet

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The suitability of ultrasonic and megasonic cleaning of nanoscale patterns in ammonia hydroxide solutions for particle removal and feature damage

Semiconductor Science and Technology ◽

10.1088/1361-6641/ab675d ◽

2020 ◽

Vol 35 (4) ◽

pp. 045001

Author(s):

Chun-Lin Chu ◽

Te-Yun Lu ◽

Yiin-Kuen Fuh

Keyword(s):

Particle Removal ◽

Megasonic Cleaning ◽

Nanoscale Patterns

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Particle Removal Efficiency and Damage Analysis on Silicon Wafers after Megasonic Cleaning in Solvents

Journal of Adhesion Science and Technology ◽

10.1163/016942409x12459095670430 ◽

2009 ◽

Vol 23 (12) ◽

pp. 1709-1721 ◽

Cited By ~ 2

Author(s):

Francesca Barbagini ◽

Sandip Halder ◽

Tom Janssens ◽

Karine Kenis ◽

Kurt Wostyn ◽

...

Keyword(s):

Removal Efficiency ◽

Silicon Wafers ◽

Damage Analysis ◽

Particle Removal ◽

Megasonic Cleaning

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Self-Cleaning Characteristic of the Insect (Lepidoptera) Wing Surfaces

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.1089.198 ◽

2015 ◽

Vol 1089 ◽

pp. 198-201

Author(s):

Gang Sun ◽

Yan Fang

Keyword(s):

Coupling Effect ◽

Removal Rate ◽

Wing Surface ◽

Particle Removal ◽

Structural Element ◽

Sliding Angle ◽

Cleaning Performance ◽

Material Element ◽

Infrared Spectrometer ◽

Self Cleaning

The microstructure, hydrophobicity, adhesion and chemical composition of the butterfly and the moth wing surfaces were investigated by a scanning electron microscope (SEM), a contact angle (CA) meter, and a Fourier transform infrared spectrometer (FT-IR). Using ground calcium carbonate (heavy CaCO3) as contaminating particle, the self-cleaning performance of the wing surface was evaluated. The wing surfaces, composed of naturally hydrophobic material (chitin, protein, fat, etc.), possess complicated hierarchical micro/nanostructures. According to the large CA (149.5~156.9° for butterfly, 150.5~155.6° for moth) and small sliding angle (SA, 1~3°), the wing surface is of low adhesion and superhydrophobicity. The removal rate of contaminating particle from the wing surface is averagely 88.3% (butterfly wing) and 88.0% (moth wing). There is a good positive correlation (R2=0.8152 for butterfly, 0.8436 for moth) between particle removal rate and roughness index of the wing surface. The coupling effect of material element and structural element contributes to the outstanding superhydrophobicity and self-cleaning performance of the wing surface. The wings of Lepidoptera insect can be potentially used as templates for biomimetic preparation of intelligent interfacial material with multi-functions.

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Dissolved air flotation model for drinking water treatment

Canadian Journal of Civil Engineering ◽

10.1139/l99-071 ◽

2000 ◽

Vol 27 (2) ◽

pp. 373-382 ◽

Cited By ~ 3

Author(s):

Ayman R Shawwa ◽

Daniel W Smith

Keyword(s):

Water Treatment ◽

Kinetic Model ◽

Contact Zone ◽

Removal Rate ◽

Particle Removal ◽

Dissolved Air Flotation ◽

First Order ◽

Air Flotation ◽

Particle Attachment ◽

Dissolved Air

In this study, a kinetic model that describes bubble-particle transport and attachment in the contact zone of dissolved air flotation (DAF) process is presented. The kinetic model, which is based on the assumption that the contact zone is analogous to a chemical reactor, describes the particle removal rate as a first-order reaction with respect to the concentration of particles. It identified important parameters, such as the bubble-particle attachment efficiency (αPB). The theoretical first-order particle removal rate constant (kP), based on the mathematical model, was determined by varying αPB from 0.1 to 1.0. On the other hand, the experimental kP value was determined by measuring the mean residence time, the degree of mixing of particles, and the particle removal efficiency of the contact zone by conducting pilot-scale DAF experiments at different hydraulic loading rates and recycle ratios. The experimentally determined first-order particle removal rate constant was equal to the theoretical kP value when the bubble-particle attachment efficiency (αPB) was in the range of 0.35 to 0.55, which is considered typical for water treatment applications. The kinetic model can be used to predict DAF removal efficiencies provided that αPB is determined for the system under investigation and that the operating conditions applied in this research are used. However, independent experiments are required to verify the applicability of the proposed model.Key words: algae, bubble, coagulation, dissolved air flotation, flocculation, kinetic model, particle size distribution, water treatment.

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Developments for Physical Cleaning Sample with High Adhesion Force Particles and Direct Measurement of its Removal Force

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.255.201 ◽

2016 ◽

Vol 255 ◽

pp. 201-206 ◽

Cited By ~ 1

Author(s):

Emu Tokuda ◽

Toshiyuki Sanada ◽

Futoshi Iwata ◽

Chikako Takato ◽

Hirokuni Hiyama ◽

...

Keyword(s):

Particle Size ◽

Direct Measurement ◽

Adhesion Force ◽

Removal Rate ◽

Particle Removal ◽

Cleaning Performance ◽

High Adhesion ◽

Particle Adhesion Force ◽

Particle Sample ◽

Measured Particle

We quantitatively evaluate the wet cleaning performance of particle cotamination. We made particle sample which endure the wet cleaning and measured particle adhesion force by self-sensitive cantilever. The advantage of this method is that performed in both air and water. As a result, there were no significant differences between the air and water condition and the influence of particle size were dominant. Using this sample, we demonstrated particle removal rate of droplets impacts and PVA brush.

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Micro Scale Air Sampling Devices: A Numerical Study

Volume 7: Fluids Engineering ◽

10.1115/imece2016-68061 ◽

2016 ◽

Author(s):

Iman Mirzaee ◽

Majid Charmchi ◽

Hongwei Sun ◽

Minghao Song

Keyword(s):

Stokes Equations ◽

Numerical Study ◽

Removal Rate ◽

Piecewise Linear ◽

Air Sampling ◽

Terminal Velocity ◽

Liquid Column ◽

Force Balance ◽

Particle Removal ◽

Sampling Device

Numerical simulation of particle collection in a newly developed microfluidic air sampling device is presented in this study. In the simulations, the air carrying the particles is injected into a liquid column to form a bubble. The bubble then releases from the air inlet following with interface deformations and rises in the liquid column carrying the particles inside. During this bubbling process, the particles having impact with the bubble interface are collected in the extraction liquid. For the simulations, Navier-Stokes equations are solved along with piecewise-linear Volume-of-Fluid (VOF) method for tracking the interface deformations. The particle trajectories are predicted on a Lagrangian frame of reference by integrating the force balance on each particle. To validate the numerical model, the results for bubble terminal velocity and shape, and particle removal rate are compared with the available experimental data in the literature. Finally, particle removal from different bubble sizes is studied.

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