Study on Uniform Deposition on 300 mm Silicon Wafer with Sub-100 nm Sized Particles for Cleaning Application

2021 ◽  
Vol 314 ◽  
pp. 209-213
Author(s):  
Seungjae Lee ◽  
Seokjun Hong ◽  
Haerim Oh ◽  
Seung Ki Chae ◽  
Taesung Kim
Keyword(s):  
Particle Size ◽  
Particle Deposition ◽  
Rotation Speed ◽  
Sem Analysis ◽  
Deposition Chamber ◽  
Wafer Cleaning ◽  
Size Uniformity ◽  
Cleaning Technology ◽  
And Diffusion ◽  
Uniform Deposition

A study for uniform deposition on whole area of wafer was conducted to help check the uniformity of cleaning technology between wafer center to edge. A new method of particle deposition was devised different from the conventional studies using the center nozzle and electric field. Our deposition chamber features wafer rotating method and deposition by the principle of convection and diffusion. In this study, we focused on the effect of wafer rotation speed and rotation number to particle deposition result. After setting the optimum condition, fine results with well deposited shape on whole area of the wafer and outstanding particle size uniformity of more than 70% were obtained. Although particle size shift phenomenon occurred in the measurement result using SP5 due to the intrinsic principle, SEM analysis demonstrated that particles with 60, 80 nm sized silica particles were well deposited on wafer. We believe the standard wafer made by our particle deposition system could be utilized and helpful for performance evaluation and development of wafer cleaning technologies.

scholarly journals Encapsulated Urea-Kaolinite Nanocomposite for Controlled Release Fertilizer Formulations

2015 ◽  
Vol 2015 ◽  
pp. 1-17 ◽  
Author(s):  
Siafu Ibahati Sempeho ◽  
Hee Taik Kim ◽  
Egid Mubofu ◽  
Alexander Pogrebnoi ◽  
Godlisten Shao ◽  
...  
Keyword(s):  
Particle Size ◽  
Controlled Release ◽  
Crystal Lattice ◽  
Gum Arabic ◽  
Sem Analysis ◽  
Particle Sizes ◽  
Major Phase ◽  
Controlled Release Fertilizer ◽  
X Ray ◽  
And Diffusion

Urea controlled release fertilizer (CRF) was prepared via kaolinite intercalation followed by gum arabic encapsulation in an attempt to reduce its severe losses associated with dissolution, hydrolysis, and diffusion. Following the beneficiation, the nonkaolinite fraction decreased from 39.58% to 0.36% whereas the kaolinite fraction increased from 60.42% to 99.64%. The X-ray diffractions showed that kaolinite was a major phase with FCC Bravais crystal lattice with particle sizes ranging between 14.6 nm and 92.5 nm. The particle size varied with intercalation ratios with methanol intercalated kaolinite > DMSO-kaolinite > urea-kaolinite (KPDMU). Following intercalation, SEM analysis revealed a change of order from thick compact overlapping euhedral pseudohexagonal platelets to irregular booklets which later transformed to vermiform morphology and dispersed euhedral pseudohexagonal platelets. Besides, dispersed euhedral pseudohexagonal platelets were seen to coexist with blocky-vermicular booklets. In addition, a unique brain-form agglomeration which transformed into roundish particles mart was observed after encapsulation. The nanocomposites decomposed between 48 and 600°C. Release profiles showed that 100% of urea was released in 97 hours from KPDMU while 87% was released in 150 hours from the encapsulated nanocomposite. The findings established that it is possible to use Pugu kaolinite and gum arabic biopolymer to prepare urea CRF formulations.

Thermal Spraying of Nanostructured Coatings by Hypersonic Plasma Particle Deposition

1997 ◽  
Author(s):  
J. Heberlein ◽  
N.P. Rao ◽  
A. Neuman ◽  
J. Blum ◽  
N. Tymiak ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Particle Size ◽  
Particle Deposition ◽  
Nanostructured Coatings ◽  
Plasma Stream ◽  
Size Distributions ◽  
Particle Size Distributions ◽  
Plasma Particle ◽  
Deposition Chamber ◽  
Hypersonic Plasma Particle Deposition

Abstract A novel plasma spray process for producing nanostructured coatings, hypersonic plasma particle deposition (HPPD), has been experimentally investigated. In HPPD, vapor phase precursors are injected into a plasma stream generated by a DC arc. The plasma is quenched by supersonic expansion through a nozzle into a vacuum (~ 2 torr) deposition chamber. Ultrafine particles nucleated in the nozzle are accelerated in the hypersonic free jet downstream of the nozzle and inertially deposited onto a substrate. The short transit times between the nozzle and the substrate (< 50 μs) prevent inflight agglomeration, while the high particle deposition velocities result in the formation of a consolidated coating. We have investigated the production of silicon and silicon carbide coatings using SiCl4 and CH4 precursors. Silicon deposits analyzed by transmission electron microscopy were found to have nanostructured regions with grain sizes varying from 5-20 nm. Corresponding particle size distributions measured before deposition using an extractive aerosol probe peaked around 15 nm, suggesting negligible grain growth occurred in the samples studied. Silicon carbide particle size distributions measured at various deposition chamber pressures verify that the low residence time characteristic of the HPPD process minimizes in-flight agglomeration.

Certain Problems with the Application of Stochastic Diffusion Processes for the Description of Chemical Engineering Phenomena. Diffusional Change of Solid Particle Size

1996 ◽  
Vol 61 (4) ◽  
pp. 536-563
Author(s):  
Vladimír Kudrna ◽  
Pavel Hasal
Keyword(s):  
Particle Size ◽  
Solid Particle ◽  
Chemical Engineering ◽  
Diffusion Processes ◽  
Granular Systems ◽  
Size Distributions ◽  
Particle Size Distributions ◽  
Diffusion Term ◽  
Population Balances ◽  
And Diffusion

To the description of changes of solid particle size in population, the application was proposed of stochastic differential equations and diffusion equations adequate to them making it possible to express the development of these populations in time. Particular relations were derived for some particle size distributions in flow and batch equipments. It was shown that it is expedient to complement the population balances often used for the description of granular systems by a "diffusion" term making it possible to express the effects of random influences in the growth process and/or particle diminution.

scholarly journals A Numerical Study of the Effect of Particle Size on Particle Deposition on Turbine Vanes and Blades

2021 ◽  
Vol 13 (5) ◽  
pp. 168781402110178
Author(s):  
Zhengang Liu ◽  
Weinan Diao ◽  
Zhenxia Liu ◽  
Fei Zhang
Keyword(s):  
Particle Size ◽  
Particle Deposition ◽  
Numerical Study ◽  
Stokes Number ◽  
Capture Efficiency ◽  
Particle Capture ◽  
Factors Affecting ◽  
Pressure Surface ◽  
Deposition Area ◽  
Turbine Vanes

Particle deposition could decrease the aerodynamic performance and cooling efficiency of turbine vanes and blades. The particle motion in the flow and its temperature are two important factors affecting its deposition. The size of the particle influences both its motion and temperature. In this study, the motion of particles with the sizes from 1 to 20 μm in the first stage of a turbine are firstly numerically simulated with the steady method, then the particle deposition on the vanes and blades are numerically simulated with the unsteady method based on the critical viscosity model. It is discovered that the particle deposition on vanes mainly formed near the leading and trailing edge on the pressure surface, and the deposition area expands slowly to the whole pressure surface with the particle size increasing. For the particle deposition on blades, the deposition area moves from the entire pressure surface toward the tip with the particle size increasing due to the effect of rotation. For vanes, the particle capture efficiency increases with the particle size increasing since Stokes number and temperature of the particle both increase with its size. For blades, the particle capture efficiency increases firstly and then decreases with the particle size increasing.

Dynamic consolidation of cubic boron nitride and its admixtures

1988 ◽  
Vol 3 (5) ◽  
pp. 1010-1020 ◽  
Author(s):  
Hua Tan ◽  
Thomas J. Ahrens
Keyword(s):  
Particle Size ◽  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Sem Analysis ◽  
Model Calculations ◽  
Boron Nitride Powder ◽  
Dynamic Consolidation ◽  
Consolidation Model ◽  
Heating Model ◽  
Hardness Values

Cubic boron nitride (C–BN)' powders admixed with graphite-structured boron nitride powder (g-DN), silicon carbide whisker (SCW), or silicon nitride whisker (SNW) were shock compacted to pressures up to 22 GPa. Unlike previous work with diamond and graphite [D. K. Potter and T. J. Ahrens, J. Appl. Phys. 63, 910 (1987) it was found that the addition of g-BN inhibited dynamic consolidation. Good consolidation was achieved with a 4–8 μm particle size C–BN powder admixed with 15 wt.% SNW or 20 wt.% SCW whereas a 37–44 μm particle size C–BN mixture was only poorly consolidated. Scanning electron microscopy (SEM) analysis demonstrates that SCW and SNW in the mixtures were highly deformed and indicated melt textures. A skin heating model was used to describe the physics of consolidation. Model calculations are consistent with SEM analysis images that indicate plastic deformation of SCW and SNW. Micro-Vickers hardness values as high as 50 GPa were obtained for consolidated C–BN and SNW mixtures. This compares to 21 GPa for single-crystal Al2O3 and 120 GPa for diamond.

A Numerical Model for Simulating Liquid Particles Deposition on Surface

2018 ◽  
Author(s):  
Zhenxia Liu ◽  
Fei Zhang ◽  
Zhengang Liu
Keyword(s):  
Particle Size ◽  
Numerical Model ◽  
Particle Deposition ◽  
Surface Profile ◽  
Leading Edge ◽  
Solid Particles ◽  
Liquid Particle ◽  
Aircraft Icing ◽  
Turbine Vane ◽  
Deposition Thickness

The deposition of liquid particles, which may be converted from solid particles due to high temperature gas heating, makes much more harm on turbine vane blades compared to solid particles, since it may block film-cooling holes, worsen the cooling efficiency and aerodynamic performance of the turbine vane blades. Due to the similarity between the deposition of liquid particles on a surface and the icing on a surface, a numerical model for simulating particles deposition was developed based on the Myers icing model, an extension of the Messinger model, which has been applied in predicting aircraft icing or aero-engine icing. Compared to the conventional liquid particle deposition model, the numerical model in this paper considers the heat transfer and the flow of liquid particles during the particles phase transition from liquid state to solid state. In this model, the change of the surface profile due to the particles deposition was also considered, which was implemented with dynamic mesh technique. To test this model, deposition distribution and thickness obtained from the numerical simulations were compared to the experimental results. Additionally, a numerical simulation was conducted for liquid particle deposition on a flat plate. The result showed that the deposition thickness at the leading edge was much larger than that on the upper surface where the deposition appeared mainly at the middle and rear of the plate. The deposition mass and thickness increased with the increasing in the particle size. The effect of the particle size on the deposition thickness was more notable on the upper surface compared to that at the leading edge.

A theory of aerosol deposition in the human respiratory tract

1975 ◽  
Vol 38 (1) ◽  
pp. 77-85 ◽  
Author(s):  
D. B. Taulbee ◽  
C. P. Yu
Keyword(s):  
Particle Size ◽  
Respiratory Tract ◽  
Particle Deposition ◽  
Particle Concentration ◽  
Diffusion Mechanism ◽  
Aerosol Deposition ◽  
Lung Model ◽  
Brownian Diffusion ◽  
Human Respiratory Tract ◽  
Apparent Diffusion

The deposition of inhaled aerosol particles in the human respiratory tract is due to the mechanisms of inertia impaction, Brownian diffusion, and gravitational settling. A theory is developed to predict the particle deposition and its distribution in human respiratory tract for any breathing condition. A convection-diffusion equation for the particle concentration with a loss term is used to describe the transport and deposition of particles. In this equation, an apparent diffusion coefficient due to the velocity dispersion in the lung is present and found to be the dominant diffusion mechanism for the cases considered here. Expressions for deposition by various mechanisms are also derived. The governing equation is solved numerically with Weibel's lung model A. The particle concentration at the mouth is calculated during washin and washout and compared favorably with experimental recordings for 0.5-mum diameter di(2-ethylhexyl) sebacate particles. The total deposition in the lung for particle size ranging from 0.05 to 5 mum is also computed for a 500-cm-3 tidal volume and 15 breaths/min. The results in general agree with recent measurements of Heyder et al. However, a particle size of minimum deposition is found to exist theoretically near 0.3 mum.

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