Characterization of Mo-AlNxOy Thin Films Deposited by RF Magnetron Sputtering
2017 ◽
Vol s1
(1)
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Keyword(s):
2018 ◽
Vol 30
(3)
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pp. 2285-2291
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Keyword(s):
2009 ◽
Vol 21
(8)
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pp. 844-848
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2014 ◽
Vol 313
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pp. 196-206
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1998 ◽
Vol 13
(4)
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pp. 404-409
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1994 ◽
Vol 178
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pp. 233-237
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