Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology Chemical Mechanical Planarization
2007 ◽
Vol 8
(1)
◽
pp. 1-4
◽
2015 ◽
Vol 4
(11)
◽
pp. P5029-P5039
◽
1999 ◽
Vol 347
(1-2)
◽
pp. 248-252
◽
2021 ◽
Vol 10
(2)
◽
pp. 024009
2017 ◽
Vol 6
(7)
◽
pp. P455-P461
◽
2004 ◽
Vol 43
(11A)
◽
pp. 7427-7433
◽